# 電子分光法における表面感度と検出深さ

https://mdr.nims.go.jp/datasets/8f8f1bed-0818-40d9-8388-f076bf078906

## File

- [表面真空_田沼_2021_3_normal+.docx](https://mdr.nims.go.jp/filesets/ca9c58b7-ad28-4577-b935-8c0ce9980b44/download) ([Detail](https://mdr.nims.go.jp/filesets/ca9c58b7-ad28-4577-b935-8c0ce9980b44.md))

## Id

8f8f1bed-0818-40d9-8388-f076bf078906

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-01-27T01:08:13.852424Z

## Updated at

2024-01-05T13:12:47.677493Z

## Published at

2023-02-01T03:31:07.357511Z

## Doi

https://doi.org/10.48505/nims.3853

## First published url

https://doi.org/10.1380/vss.65.102

## Date published

2022-03-10

## Recorded date published

2022

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: 電子分光法における表面感度と検出深さ
  title_type: original
  lang: ja
- title: Surface Sensitivity and Detection Depth for Electron Spectroscopy
  title_type: alternative
  lang: en

## Description

- description: The four physical parameters describing inelastic scattering of electrons,
    which is a measure of surface sensitivity, were described. The definitions of
    the four parameters, namely, inelastic mean free path (IMFP), mean escape depth
    (MED), effective attenuation length (EAL), and information depth (ID), are given,
    and their determination methods and predictive equations were explained. Most
    of these equations are also applicable to hard X-ray photoelectron spectroscopy.
    At this time, the author concludes that IMFP and MED are the most appropriate
    parameters to describe surface sensitivity and detection depth from the standpoint
    of clarity of definition and practicality.
  description_type: abstract
  lang: jpn

## Creator

- name: 田沼 繁夫
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941
  organization: 物質・材料研究機構
  department: 統合型材料開発・情報基盤部門/材料データプラットフォームセンター/データサービスチーム
  ror: https://ror.org/026v1ze26

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## Keyword

- subject: surface sensitivity
  schema: not_defined
- subject: mean escape depth
  schema: not_defined
- subject: effective attenuation length
  schema: not_defined
- subject: information depth
  schema: not_defined
- subject: inelastic mean free path
  schema: not_defined

## Rights

- description: Creative Commons BY-NC Attribution-NonCommercial 4.0 International
  identifier: https://creativecommons.org/licenses/by-nc/4.0/

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## Embargo



## Journal

- title: Vacuum and Surface Science
  issn: '24335835'
  volume: '65'
  issue: '3'
  start_page: 102
  end_page: 108

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## Specimen



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## Fileset

- id: ca9c58b7-ad28-4577-b935-8c0ce9980b44
  filename: 表面真空_田沼_2021_3_normal+.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 2597082
  md5: e3e4e3e46e9e29ba717e6f5bf46b5a0d

## Thumbnail

fileset_id: ca9c58b7-ad28-4577-b935-8c0ce9980b44
filename: 表面真空_田沼_2021_3_normal+.docx