@misc{yuichi2018a,
  title = {Growth and etching characteristics of (001) β- Ga2O3 by plasma-assisted molecular beam epitaxy},
  author = {Yuichi Oshima, Elaheh Ahmadi, Stephen Kaun, Feng Wu, James S Speck},
  publisher = {IOP Publishing},
  year = {2018-01-01},
  keywords = {β-Ga2O3, MBE}
}