# High quality epitaxial, homogeneous anatase thin films by on-site controlled hydrolysis on LaAlO3 substrates and characterization

https://mdr.nims.go.jp/datasets/8a8706dd-eded-4bd7-a37d-78d8c570d4d5

## File

- [-Revised-Articlehigh_quality_epitaxial_thin_films_by_on-without_highlight.pdf](https://mdr.nims.go.jp/filesets/fa5d2cdc-47a9-4e4d-8cad-5249e7122ccd/download) ([Detail](https://mdr.nims.go.jp/filesets/fa5d2cdc-47a9-4e4d-8cad-5249e7122ccd.md))

## Id

8a8706dd-eded-4bd7-a37d-78d8c570d4d5

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-07-15T05:38:27.428400Z

## Updated at

2025-07-16T07:30:37.967245Z

## Published at

2025-07-16T07:18:22.914336Z

## Doi

https://doi.org/10.48505/nims.5594

## First published url

https://doi.org/10.1080/14686996.2025.2518747

## Date published

2025-12-31

## Recorded date published

2025-12-31

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: High quality epitaxial, homogeneous anatase thin films by on-site controlled
    hydrolysis on LaAlO3 substrates and characterization
  title_type: original
  lang: en

## Description

- description: The anatase form of TiO₂ is a widely studied material due to its broad
    range of applications. Epitaxial anatase thin films have attracted significant
    attention because of their enhanced electrical and optical properties. However,
    fabricating anatase thin films remains challenging due to their metastability
    and the need for highly sophisticated fabrication techniques. On-site controlled
    hydrolysis is a simple, cost-effective, and rapid method for producing smooth,
    compact thin films on various surfaces. In this study, we demonstrate a straightforward
    approach to fabricating highly oriented epitaxial anatase thin films on LaAlO₃
    substrates using different solvent mixtures. The epitaxial orientation and film
    quality were analyzed using X-ray diffraction pole figures and rocking curves,
    while surface morphology was characterized by Scanning electron microscopy and
    atomic force microscopy. Our results indicate that thin film quality and morphology
    are primarily influenced by the annealing temperature rather than the choice of
    solvent or titanium precursor, confirming the feasibility of a scalable, low-cost
    epitaxial fabrication technique for anatase thin films.
  description_type: abstract
  lang: en

## Creator

- name: Sudu Hakuruge Dilan Priyankara Wijekoon
  role: author
  organization: Shizuoka University
  department: a Graduate School of Science and Technology
- name: Kosuke Ono
  role: author
- name: Masaru Shimomura
  role: author
- name: Takahiko Kawaguchi
  role: author
- name: Naonori Sakamoto
  role: author
- name: Naoki Wakiya
  role: author

## Contact agent



## Publisher

organization: Taylor & Francis

## Managing organization



## Keyword

- subject: Anatase titanium dioxide
  schema: not_defined
- subject: solid state epitaxy
  schema: not_defined
- subject: on-site controlled hydrolysis
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Science and Technology of Advanced Materials
  issn: '14686996'
  volume: '26'
  article_number: '2518747'

## Conference



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## Instrument



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## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



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## Fileset

- id: fa5d2cdc-47a9-4e4d-8cad-5249e7122ccd
  filename: "-Revised-Articlehigh_quality_epitaxial_thin_films_by_on-without_highlight.pdf"
  content_type: application/pdf
  size: 3714768
  md5: 1d3b02c00645d7ae4060c4aadf8d56aa

## Thumbnail

fileset_id: fa5d2cdc-47a9-4e4d-8cad-5249e7122ccd
filename: "-Revised-Articlehigh_quality_epitaxial_thin_films_by_on-without_highlight.pdf"