# Highly Nitrogen Doped SrTiO3 Thin Films using Reactive Magnetron Sputtering

https://mdr.nims.go.jp/datasets/89c8f74c-ad4f-4549-af2b-1752d64e5cac

## File

- [金PS26_STAC2024_AbstractBook-V1.pdf](https://mdr.nims.go.jp/filesets/28fe1db0-fbbf-43a3-a883-057e913ab65a/download) ([Detail](https://mdr.nims.go.jp/filesets/28fe1db0-fbbf-43a3-a883-057e913ab65a.md))

## Id

89c8f74c-ad4f-4549-af2b-1752d64e5cac

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-03-01T00:58:47.085149Z

## Updated at

2024-07-09T08:25:10.991401Z

## Published at

2024-07-09T08:25:11.408616Z

## Doi

https://doi.org/10.48505/nims.4587

## First published url



## Date published



## Recorded date published



## Resource type

conference_poster

## Manuscript type

na

## Collection



## Title

- title: Highly Nitrogen Doped SrTiO3 Thin Films using Reactive Magnetron Sputtering
  title_type: original
  lang: en

## Description

- description: Global warming requires the development of environmentally friendly
    science and technology and the creation of business. In recent years, research
    into clean energy device materials that can obtain safe energy by utilizing natural
    energy such as sunlight has become active. Wide-gap semiconductor, TiO2 and SrTiO3
    (STO), can be doped with various elements (C, N, F, P, S, Li, Na, K, Mg, Ca, Ba,
    etc.) for photocatalytic applications. In addition, visible light of sunlight
    can be effectively utilized. In this study, we report on the properties of highly
    nitrogen doped STO (HSTO) films. The films were deposited by RF magnetron sputtering
    on quartz or Pt/quartz substrates in a nitrogen atmosphere using an STO target.
    As a result, NSTO with a nitrogen concentration of 9.5 atom% was obtained, and
    the band gap decreased from 3.5 eV of STO to 1.9 eV. The perovskite structure
    was maintained, and optical properties were obtained in the visible light region.
  description_type: abstract
  lang: eng

## Creator

- name: Jedeok Kim
  role: author
  orcid: https://orcid.org/0000-0003-4301-1044
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Environmental Circulation Composite Materials Group
  ror: https://ror.org/026v1ze26
- name: Itaru Honma
  role: author
  organization: AIST

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## Keyword

- subject: SrTiO3 (STO)
  schema: not_defined
- subject: Reactive magnetron sputtering
  schema: not_defined
- subject: Semiconductor
  schema: not_defined
- subject: Photocatalyst
  schema: not_defined
- subject: Nitrogen doping
  schema: not_defined
- subject: Nitrogen doped STO
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal



## Conference

name: The International Conference on the Science and Technology for Advanced Ceramics
  (STAC) - Data Driven Materials Research for Electronics. 2024
start_date: 2024-02-29
identifier: http://conf.msl.titech.ac.jp/Conference5/STAC_D2MatE/wiki/

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## Measurement method



## Specimen



## Chemical composition



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## Fileset

- id: 28fe1db0-fbbf-43a3-a883-057e913ab65a
  filename: 金PS26_STAC2024_AbstractBook-V1.pdf
  content_type: application/pdf
  size: 232820
  md5: 6c6d60ed884994d0d430043294069f1a

## Thumbnail

fileset_id: 28fe1db0-fbbf-43a3-a883-057e913ab65a
filename: 金PS26_STAC2024_AbstractBook-V1.pdf