@misc{yuichi2023a,
  title = {Reduction of dislocation density in α-Ga2O3 epilayers via rapid growth at low temperatures by halide vapor phase epitaxy},
  author = {Yuichi Oshima, Hiroyuki Ando, Takashi Shinohe},
  publisher = {IOP Publishing},
  year = {2023-06-01},
  keywords = {α-Ga2O3, dislocation, HVPE}
}