# Sub-50 nm patterning of alloy thin films <i>via</i> nanophase separation for hydrogen gas sensing

https://mdr.nims.go.jp/datasets/88f1e9e5-27f2-4352-90a1-74ecb9dd992e

## File

- [ManuscriptFinalized.docx](https://mdr.nims.go.jp/filesets/dc8aa0b9-5997-43db-9e51-49fb56192f75/download) ([Detail](https://mdr.nims.go.jp/filesets/dc8aa0b9-5997-43db-9e51-49fb56192f75.md))

## Id

88f1e9e5-27f2-4352-90a1-74ecb9dd992e

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-11-29T00:44:01.596286Z

## Updated at

2024-12-05T03:47:34.899448Z

## Published at

2024-12-05T03:47:35.020712Z

## Doi

https://doi.org/10.48505/nims.5057

## First published url

https://doi.org/10.1039/d4na00071d

## Date published

2024-04-17

## Recorded date published

2024-5-14

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: Sub-50 nm patterning of alloy thin films <i>via</i> nanophase separation
    for hydrogen gas sensing
  title_type: original
  lang: en

## Description

- description: 'A novel patterning method achieves a two-dimensional nano-pattern
    of metal nanofibers by depositing a platinum-cerium alloy film on a silicon wafer
    and inducing phase separation in an oxygen-carbon monoxide atmosphere. The resulting
    nano-patterned thin film, Pt#CeO2/Si, consisting of platinum and cerium oxide
    with an average pattern width of 50 nm, exhibits potential as a hydrogen sensor
    with sensitive electrical responses to hydrogen ad/desorption. This introduced
    patterning method addresses the challenge of wavelength limitations in traditional
    optical lithography, offering a scalable approach for sub-50 nm patterns crucial
    in advanced sensor and electronic applications. '
  description_type: abstract
  lang: und

## Creator

- name: Sherjeel Mahmood Baig
  role: author
- name: Satoshi Ishii
  role: author
  orcid: https://orcid.org/0000-0003-0731-8428
- name: Hideki Abe
  role: author
  orcid: https://orcid.org/0000-0002-8392-7586

## Contact agent



## Publisher

organization: Royal Society of Chemistry (RSC)

## Managing organization



## Keyword

- subject: Alloy
  schema: not_defined
- subject: Hydrogen gas sensing
  schema: not_defined
- subject: Nano-phase separation
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Nanoscale Advances
  issn: '25160230'
  volume: '6'
  issue: '10'
  start_page: 2582
  end_page: 2585

## Conference



## Related item



## Funding

- identifier: 22H01799
  funder_name: Japan Society for the Promotion of Science
- identifier: JPMXP1223NM5363
  funder_name: Ministry of Education, Culture, Sports, Science and Technology

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



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## Process for specimen treatment



## Computational method



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## Fileset

- id: dc8aa0b9-5997-43db-9e51-49fb56192f75
  filename: ManuscriptFinalized.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 27649835
  md5: 1021161710586ac3fe93b23ccd8dbbe2

## Thumbnail

fileset_id: dc8aa0b9-5997-43db-9e51-49fb56192f75
filename: ManuscriptFinalized.docx