# Electron trapping/detrapping at oxygen vacancies and imprint evolution in La-doped Hf0.5Zr0.5O2 ferroelectric capacitors probed by hard x-ray photoelectron spectroscopy

https://mdr.nims.go.jp/datasets/85a9022f-7928-465b-a2d8-d7f2aadcaec0

## File

- [HZO_Operando_SPring-8.pdf](https://mdr.nims.go.jp/filesets/7a11fcab-2023-4ba5-9125-f6e58864a20b/download) ([Detail](https://mdr.nims.go.jp/filesets/7a11fcab-2023-4ba5-9125-f6e58864a20b.md))

## Id

85a9022f-7928-465b-a2d8-d7f2aadcaec0

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-11-12T02:26:04.700252Z

## Updated at

2025-11-13T03:30:12.933802Z

## Published at

2025-11-13T03:25:53.013531Z

## Doi

https://doi.org/10.48505/nims.5901

## First published url

https://doi.org/10.1063/5.0288835

## Date published

2025-11-03

## Recorded date published

2025-11-3

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Electron trapping/detrapping at oxygen vacancies and imprint evolution in
    La-doped Hf0.5Zr0.5O2 ferroelectric capacitors probed by hard x-ray photoelectron
    spectroscopy
  title_type: original
  lang: en

## Description

- description: TiN/LaドープHf₀.₅Zr₀.₅O₂/TiN強誘電体キャパシタにおいて、分極に依存した酸素空孔分布と酸素空孔跡の相関をオペランド硬X線光電子分光法を用いて明らかにした。
  description_type: abstract
  lang: und

## Creator

- name: W. Hamouda
  role: author
  orcid: https://orcid.org/0000-0002-7055-7264
- name: Y. Yamashita
  role: author
  orcid: https://orcid.org/0000-0003-0994-8095
- name: S. Ueda
  role: author
  orcid: https://orcid.org/0000-0001-9425-0614
- name: S. Matzen
  role: author
  orcid: https://orcid.org/0000-0002-4244-6516
- name: O. Renault
  role: author
  orcid: https://orcid.org/0000-0002-0683-9590
- name: F. Mehmood
  role: author
  orcid: https://orcid.org/0000-0002-9530-380X
- name: T. Mikolajick
  role: author
  orcid: https://orcid.org/0000-0003-3814-0378
- name: U. Schroeder
  role: author
  orcid: https://orcid.org/0000-0002-6824-2386
- name: N. Barrett
  role: author
  orcid: https://orcid.org/0000-0002-8228-0805

## Contact agent



## Publisher

organization: AIP Publishing

## Managing organization



## Keyword

- subject: " Hf0.5Zr0.5O2"
  schema: not_defined
- subject: HAXPES
  schema: not_defined
- subject: operando
  schema: not_defined

## Rights

- description: 'This article may be downloaded for personal use only. Any other use
    requires prior permission of the author and AIP Publishing. This article appeared
    in W. Hamouda, Y. Yamashita, S. Ueda, S. Matzen, O. Renault, F. Mehmood, T. Mikolajick,
    U. Schroeder, N. Barrett; Electron trapping/detrapping at oxygen vacancies and
    imprint evolution in La-doped Hf0.5Zr0.5O2 ferroelectric capacitors probed by
    hard x-ray photoelectron spectroscopy. Appl. Phys. Lett. 3 November 2025; 127
    (18): 182902 and may be found at https://doi.org/10.1063/5.0288835.'
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Applied Physics Letters
  issn: '00036951'
  volume: '127'
  issue: '18'
  article_number: '182902'

## Conference



## Related item



## Funding

- identifier: '780302'
  funder_name: Horizon 2020 Framework Programme

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 7a11fcab-2023-4ba5-9125-f6e58864a20b
  filename: HZO_Operando_SPring-8.pdf
  content_type: application/pdf
  size: 925024
  md5: 5ae998618e9d18d62e2fb8646e55a366

## Thumbnail

fileset_id: 7a11fcab-2023-4ba5-9125-f6e58864a20b
filename: HZO_Operando_SPring-8.pdf