@misc{yuichi2014a,
  title = {Hydride Vapor Phase Epitaxy and characterization of High-Quality ScN epilayers},
  author = {Yuichi Oshima, Encarnación G. Víllora, Kiyoshi Shimamura},
  publisher = {AIP Publishing},
  year = {2014-04-21},
  keywords = {ScN, HVPE}
}