# Multiple-angle incidence resolution spectrometry: applications in nanoarchitectonics and applied physics

https://mdr.nims.go.jp/datasets/843b0d77-5796-46b6-9a52-c88bedc85e68

## File

- [Final MS JJAP MAIRS.pdf](https://mdr.nims.go.jp/filesets/b9558f21-b359-444f-b82f-37be87db6b18/download) ([Detail](https://mdr.nims.go.jp/filesets/b9558f21-b359-444f-b82f-37be87db6b18.md))

## Id

843b0d77-5796-46b6-9a52-c88bedc85e68

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-06-15T00:23:43.875706Z

## Updated at

2025-05-12T23:30:12.689516Z

## Published at

2025-05-12T23:19:27.207441Z

## Doi

https://doi.org/10.48505/nims.4545

## First published url

https://doi.org/10.35848/1347-4065/ad4ad8

## Date published

2024-06-03

## Recorded date published

2024-6-3

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: 'Multiple-angle incidence resolution spectrometry: applications in nanoarchitectonics
    and applied physics'
  title_type: original
  lang: en

## Description

- description: The cutting-edge thin film studies using the multiple-angle incidence
    resolution spectrometry (MAIRS) are introduced from the principle to forefront
    applications in a wide variety of research fields covering semiconductor material
    with respect to nanoarchitectonics. In this review, in addition, another application
    for physics purposes is also introduced where phonon in thin films is discriminated
    from normal infrared absorption bands by using the MAIRS technique.
  description_type: abstract
  lang: und

## Creator

- name: Nobutaka Shioya
  role: author
  orcid: https://orcid.org/0000-0002-2915-894X
- name: Taizo Mori
  role: author
  orcid: https://orcid.org/0000-0002-6974-5137
- name: Katsuhiko Ariga
  role: author
  orcid: https://orcid.org/0000-0002-2445-2955
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Takeshi Hasegawa
  role: author
  orcid: https://orcid.org/0000-0001-5574-9869

## Contact agent



## Publisher

organization: IOP Publishing

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## Keyword

- subject: MAIRS
  schema: not_defined
- subject: nanoarchitectonics
  schema: not_defined
- subject: IR
  schema: not_defined
- subject: spectrometry
  schema: not_defined

## Rights

- description: "© 2024 The Japan Society of Applied Physics<br>This is an author-created,
    un-copyedited version of an article accepted for publication/published in Japanese
    Journal of Applied Physics. IOP Publishing Ltd is not responsible for any errors
    or omissions in this version of the manuscript or any version derived from it.
    The Version of Record is available online at  https://doi.org/10.35848/1347-4065/ad4ad8."
  identifier: http://rightsstatements.org/vocab/InC/1.0/

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## Data origin

- data_origin_type: other

## Embargo

start_date: 2024-05-13
end_date: 2025-05-13

## Journal

- title: Japanese Journal of Applied Physics
  issn: '00214922'
  volume: '63'
  issue: '6'
  start_page: 60102

## Conference



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## Funding

- funder_name: Asahi Glass Foundation
- identifier: Grant-in-Aid Challenges in Research (Exploratory)
  funder_name: Japan Society for the Promotion of Science

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## Fileset

- id: b9558f21-b359-444f-b82f-37be87db6b18
  filename: Final MS JJAP MAIRS.pdf
  content_type: application/pdf
  size: 5444584
  md5: 8f58987faf5597eac4ba296c0cea35db

## Thumbnail

fileset_id: b9558f21-b359-444f-b82f-37be87db6b18
filename: Final MS JJAP MAIRS.pdf