@article{mizutani,
  title = {Atomic Layer Deposition of Polycrystalline Tin Dioxide Thin Films Using Liquid Bis（ethylcyclopentadienyl）tin},
  author = {Fumikazu MIZUTANI, Nobutaka TAKAHASHI, Toshihide NABATAME},
  publisher = {The Surface Finishing Society of Japan},
  year = {2025},
  keywords = {Atomic layer deposition, PEALD, Poricrystaline SnO2}
}