# Effects of Plasma Reactants on Atomic Layer Deposition of Lithium Phosphate and Lithium Phosphorus Oxynitride Electrolyte Films

https://mdr.nims.go.jp/datasets/8181896c-4002-4cd9-91e7-9819be90c4dd

## File

- [ChemMater36_6139_2024.pdf](https://mdr.nims.go.jp/filesets/03cc14ee-b1f2-4032-99c7-092f1d40548c/download) ([Detail](https://mdr.nims.go.jp/filesets/03cc14ee-b1f2-4032-99c7-092f1d40548c.md))

## Id

8181896c-4002-4cd9-91e7-9819be90c4dd

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-06-26T09:46:46.495573Z

## Updated at

2025-06-24T23:30:22.034939Z

## Published at

2025-06-24T23:22:56.955875Z

## Doi

https://doi.org/10.48505/nims.4556

## First published url

https://doi.org/10.1021/acs.chemmater.4c00960

## Date published

2024-06-25

## Recorded date published

2024-6-25

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Effects of Plasma Reactants on Atomic Layer Deposition of Lithium Phosphate
    and Lithium Phosphorus Oxynitride Electrolyte Films
  title_type: original
  lang: en

## Description

- description: The effects of plasma reactants on the plasma-assisted atomic layer
    deposition (ALD) of lithium phosphate were investigated in relation to the fabrication
    of high-quality lithium phosphorus oxynitride (LiPON) thin films for the potential
    use as a solid-state electrolyte (SSE) in both microbatteries and neuromorphic
    devices. Our ALD processes enable the incorporation of nitrogen into a lithium
    phosphate matrix, using lithium tert-butoxide and tris(dimethylamino)phosphine
    as the lithium and phosphorus precursors, respectively, in a deposition temperature
    window of 220-300 °C. With O2 plasma, polycrystalline lithium phosphate films,
    with a relatively well-arranged pyrophosphate, are deposited. Amorphous LiPON
    films, with a mixture of pyrophosphates and orthophosphate, are obtained when
    Ar or NH3 plasma is used. When the NH3 flow rate increases, the nitrogen composition
    increases up to ~13%, while residual carbon is kept to below a few percent. For
    a Li2.5PO1.9N0.8 film deposited at 300 °C with NH3 plasma, the ionic conductivity
    is measured as 1.65 ± 0.42 × 10-6 S/cm at 25 °C, with an activation energy of
    0.66 eV. This conductivity is the highest value of any ALD LiPON film reported
    to date. Our ALD processes exhibit a high level of controllability of the molecular
    structures of the phosphorus oxynitride matrix, with high ionic conductivity,
    which makes them suitable for realizing high-performance Li SSE thin films.
  description_type: abstract
  lang: und

## Creator

- name: Tohru Tsuruoka
  role: author
  orcid: https://orcid.org/0000-0002-4322-4309
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Samapika Mallik
  role: author
  orcid: https://orcid.org/0000-0001-9281-9416
- name: Takuji Tsujita
  role: author
- name: Yuu Inatomi
  role: author
- name: Kazuya Terabe
  role: author
  orcid: https://orcid.org/0000-0003-3988-3456
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26

## Contact agent



## Publisher

organization: American Chemical Society (ACS)

## Managing organization



## Keyword

- subject: atomic layer deposition
  schema: not_defined
- subject: lithium phosphate
  schema: not_defined
- subject: lithium phosphorus oxynitride
  schema: not_defined
- subject: solid-state electrolyte
  schema: not_defined
- subject: plasma reactant
  schema: not_defined

## Rights

- description: This document is the Accepted Manuscript version of a Published Work
    that appeared in final form in Chemistry of Materials, copyright © 2024 American
    Chemical Society after peer review and technical editing by the publisher. To
    access the final edited and published work see https://doi.org/10.1021/acs.chemmater.4c00960
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2024-06-25
end_date: 2025-06-25

## Journal

- title: Chemistry of Materials
  issn: '08974756'
  volume: '36'
  issue: '12'
  start_page: 6193
  end_page: 6204

## Conference



## Related item



## Funding

- identifier: JPMXP1223NM5065
  funder_name: Ministry of Education, Culture, Sports, Science and Technology
- identifier: 21H03412
  funder_name: Japan Society for the Promotion of Science

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## Fileset

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  filename: ChemMater36_6139_2024.pdf
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  size: 2410111
  md5: 9515651de620755099bb3bd870d68eef

## Thumbnail

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filename: ChemMater36_6139_2024.pdf