@misc{tohru2024a,
  title = {Effects of Plasma Reactants on Atomic Layer Deposition of Lithium Phosphate and Lithium Phosphorus Oxynitride Electrolyte Films},
  author = {Tohru Tsuruoka, Samapika Mallik, Takuji Tsujita, Yuu Inatomi, Kazuya Terabe},
  publisher = {American Chemical Society (ACS)},
  year = {2024-06-25},
  keywords = {atomic layer deposition, lithium phosphate, lithium phosphorus oxynitride, solid-state electrolyte, plasma reactant}
}