Self-Aligned Hybrid Nanocavities Using Atomically Thin Materials

Chee Fai Fong; Daiki Yamashita; Nan Fang; Shun Fujii; Yih-Ren Chang; Takashi Taniguchi; Kenji Watanabe; Yuichiro K. Kato

Article Self-Aligned Hybrid Nanocavities Using Atomically Thin Materials

Chee Fai Fong ; Daiki Yamashita ; Nan Fang ; Shun Fujii ; Yih-Ren Chang ; Takashi Taniguchi (National Institute for Materials Science) ; Kenji Watanabe (National Institute for Materials Science) ; Yuichiro K. Kato

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Chee Fai Fong, Daiki Yamashita, Nan Fang, Shun Fujii, Yih-Ren Chang, Takashi Taniguchi, Kenji Watanabe, Yuichiro K. Kato. Self-Aligned Hybrid Nanocavities Using Atomically Thin Materials. ACS Photonics. 2024, 11 (6), 2247-2254.

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Two-dimensional (2D) van der Waals layered materials are often integrated with photonic crystal (PhC) nanocavity to enhance light-matter coupling. However, the transfer of 2D materials onto PhC nanocavities often degrades the cavity quality (Q) factor. Instead of using prefabricated PhC nanocavities, we demon- strate a novel approach to form a hybrid nanocavity by placing a suitably-sized 2D material flake on a PhC waveguide. We successfully fabricated such hybrid nanocavity devices with hBN, WSe2 and MoTe2 flakes on silicon PhC waveguides, obtaining Q factors as high as 4.0×105. Remarkably, even mono- and few- layer flakes can provide sufficient local refractive index modulation to induce nanocavity formation. Since the 2D material is self-aligned to the nanocavity, we have also managed to observe cavity PL enhancement in a MoTe2 hybrid cavity device, with a cavity Purcell enhancement factor of ∼15. Our results highlights the prospect of using such 2D materials-induced PhC nanocavity to realize a wide range of photonic com- ponents for hybrid devices and integrated photonic circuits.

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