@misc{ogiwara2020a, title = {English Translation of J. Surf. Anal. 24, 192-205(2018), Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam}, author = {Ogiwara, Toshiya, Nagata, Takahiro, Yoshikawa, Hideki}, publisher = {Surface Analysis Society of Japan}, year = {2020-06-04}, keywords = {Auger Depth Profiling Analysis, HfO2/Si, Ultra Low Angle Incidence Ion Beam} }