@misc{takayoshi2025a,
  title = {Fabrication of                    <i>β</i>                    -Ga                    <sub>2</sub>                    O                    <sub>3</sub>                    /air-gap structures on (010)                    <i>β</i>                    -Ga                    <sub>2</sub>                    O                    <sub>3</sub>                    by wet etching in tetramethylammonium hydroxide (TMAH)},
  author = {Takayoshi Oshima},
  publisher = {IOP Publishing},
  year = {2025-11-01},
  keywords = {Ga2O3, TMAH, wet etching, MEMS}
}