@misc{takayoshi2025a,
  title = {Fabrication of β-Ga
              <sub>2</sub>
              O
              <sub>3</sub>
              /air-gap structures on (001) β-Ga
              <sub>2</sub>
              O
              <sub>3</sub>
              using HCl gas etching},
  author = {Takayoshi Oshima, Yuichi Oshima},
  publisher = {Informa UK Limited},
  year = {2025-12-31},
  keywords = {β-Ga2O3, cantilever, air bridge, MEMS}
}