# Revealing the Surface Adsorbates of Diamond Using MEMS Resonators

https://mdr.nims.go.jp/datasets/77aca9b8-047b-4ae1-b75f-3d4cb3984124

## File

- [NDNC2025_abstract_MEMS　Gu.docx](https://mdr.nims.go.jp/filesets/cdce79e5-cee7-46cf-b111-f864e53cba8b/download) ([Detail](https://mdr.nims.go.jp/filesets/cdce79e5-cee7-46cf-b111-f864e53cba8b.md))

## Id

77aca9b8-047b-4ae1-b75f-3d4cb3984124

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-05-17T02:12:39.476765Z

## Updated at

2025-05-21T23:30:23.315911Z

## Published at

2025-05-21T23:23:07.630269Z

## Doi

https://doi.org/10.48505/nims.5491

## First published url



## Date published



## Recorded date published



## Resource type

conference_poster

## Manuscript type

na

## Collection



## Title

- title: Revealing the Surface Adsorbates of Diamond Using MEMS Resonators
  title_type: original
  lang: en

## Description

- description: "In this work, we investigate the adsorption and desorption of the
    O-termination and H-termination diamonds by in-situ measuring the shift of the
    resonance frequency of single-crystal diamond (SCD) microelectromechanical system
    (MEMS) resonators (Fig. 1(a)) in a high-vacuum chamber under different temperatures
    [4,5]. The different adsorption and desorption process of the O- and H-terminated
    diamond surface is disclosed at different temperatures. It is revealed that the
    adsorbates on the O-terminated diamond surface desorbs markedly between 373 K
    and 723 K and completes desorption at 933 K, as shown in Fig. 1(b). While the
    adsorbates on the H-terminated diamond desorb gradually between 363 K and 573
    K and desorb dramatically between 573 K and 693 K (Fig. 1(c)). Based on the shift
    of the resonator frequency, the desorbed mass of the adsorbates on the O-terminated
    and H-terminated diamond surface is calculated to be 2.2 pg and 6.6 pg, respectively,
    corresponding to the equivalent thickness of the adsorption layer of 0.4 nm and
    0.9 nm, respectively. Moreover, the surface conductivity of the H-terminated diamond
    drops by 6 orders of magnitude between 298 K and 723 K (Fig. 1(d)). These results
    disclosed by diamond MEMS provide an alternate insight into the surface nature
    of the O- and H-terminated diamond surface.\r\n\r\n"
  description_type: abstract
  lang: eng

## Creator

- name: Keyun Gu
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Zilong Zhang
  role: author
  orcid: https://orcid.org/0000-0002-9759-9253
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Wen Zhao
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Guo Chen
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Yasuo Koide
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Next-generation Semiconductor Group
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group

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## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal



## Conference

name: The 18th International Conference on New Diamond and Nano Carbons
start_date: 2025-05-11
end_date: 2025-05-15
identifier: https://ndnc2025.org/index.html

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## Fileset

- id: cdce79e5-cee7-46cf-b111-f864e53cba8b
  filename: NDNC2025_abstract_MEMS　Gu.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 605274
  md5: 19d9faaa2abffe819401058ef4b77234

## Thumbnail

fileset_id: cdce79e5-cee7-46cf-b111-f864e53cba8b
filename: NDNC2025_abstract_MEMS　Gu.docx