# Nanolaminated Al100−Ni  / AlO H  thin films by hybrid PVD / ALD: An approach towards interface-engineered thin films by dual-route tailoring

https://mdr.nims.go.jp/datasets/77a5d2e9-0aca-4b5c-8a59-43e241b4ec0a

## File

- [1-s2.0-S0264127526001504-main.pdf](https://mdr.nims.go.jp/filesets/e3b1ce5e-fd07-49f8-a18c-5d44554782f8/download) ([Detail](https://mdr.nims.go.jp/filesets/e3b1ce5e-fd07-49f8-a18c-5d44554782f8.md))

## Id

77a5d2e9-0aca-4b5c-8a59-43e241b4ec0a

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2026-04-10T09:06:35.012435Z

## Updated at

2026-04-10T09:08:28.507629Z

## Published at

2026-04-13T01:23:10.982556Z

## Doi



## First published url

https://doi.org/10.1016/j.matdes.2026.115580

## Date published

2026-01-30

## Recorded date published

2026-3

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: 'Nanolaminated Al100−Ni  / AlO H  thin films by hybrid PVD / ALD: An approach
    towards interface-engineered thin films by dual-route tailoring'
  title_type: original
  lang: en

## Description

- description: "Hybrid physical vapour/atomic layer deposition technology has enabled
    the formation of nanolaminated Al100−zNiz/AlOxHy (bilayer period: 25/1 nm, z =
    0, 2, and 5 at.%) thin films, introducing a novel interface-engineered design
    strategy with advanced microstructure control. This leverages dual-route tailoring
    of nanocrystalline Al through 1) compositional grain boundary engineering (Al100−zNiz)
    and 2) well-defined crystalline / amorphous interfaces (Al100−zNiz/AlOxHy). As
    ambient plasticity is thought to be governed by dislocation interactions with
    segregation-modified interfaces & lattice, elucidating the collective role of
    such barriers in strengthening is essential for establishing a robust design framework.\r\nAccordingly,
    high-resolution analyses by scanning transmission electron microscopy (STEM) and
    atom probe tomography (APT) established a direct link between enhanced hardness
    and distinct nanostructural features. The nanolaminated Al95Ni5 / AlOxHy thin
    film here exhibits Ni-rich nanoclusters embedded in a sub-10 nm FCC Al matrix
    and smooth ∼1 nm amorphous interlayers. Notably, STEM indicated Ni decorating
    vertical Al grain boundaries, whereas APT reveals these to be distinct Ni-rich
    nanoclusters. Nanoindentation measurements confirmed hardness of 5.3 GPa for Al95Ni5/AlOxHy
    versus 2.7 GPa for Al/AlOxHy. Calculations showed that comparable strengthening
    magnitudes originate from both aspects of the dual-route tailored nanostructure:
    impeding dislocation motion by combined crystalline–amorphous layer confined slip
    and finely dispersed nanoclusters."
  description_type: abstract
  lang: und

## Creator

- name: Hendrik C. Jansen
  role: author
  orcid: https://orcid.org/0009-0004-3513-4348
- name: Amit Sharma
  role: author
- name: Marcus Hans
  role: author
  orcid: https://orcid.org/0000-0002-1814-3101
- name: Jochen M Schneider
  role: author
  orcid: https://orcid.org/0000-0003-1239-1961
- name: Jakob Schwiedrzik
  role: author
- name: Johann Michler
  role: author
- name: Thomas E.J. Edwards
  role: author
  orcid: https://orcid.org/0000-0002-3089-0062

## Contact agent



## Publisher

organization: Elsevier BV

## Managing organization



## Keyword

- subject: Interface-engineering
  schema: not_defined
- subject: Hybrid PVD-ALD
  schema: not_defined
- subject: Nanolaminated aluminium
  schema: not_defined
- subject: Nanoclusters
  schema: not_defined
- subject: Crystalline/amorphous interface
  schema: not_defined
- subject: Nanoindentation
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



## Data origin



## Embargo



## Journal

- title: Materials & Design
  issn: '02641275'
  volume: '263'
  article_number: '115580'

## Conference



## Related item



## Funding

- identifier: 24K23036
  funder_name: Japan Society for the Promotion of Science
- identifier: '409476157'
  funder_name: Deutsche Forschungsgemeinschaft
- identifier: SFB 1394
  funder_name: Deutsche Forschungsgemeinschaft
- identifier: 109.352.1
  funder_name: Innosuisse Swiss Innovation Agency

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



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## Custom property



## Fileset

- id: e3b1ce5e-fd07-49f8-a18c-5d44554782f8
  filename: 1-s2.0-S0264127526001504-main.pdf
  content_type: application/pdf
  size: 17438912
  md5: 4060ac4f9a2c8ec42dbd5ed7b620ed12

## Thumbnail

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filename: 1-s2.0-S0264127526001504-main.pdf