# Phase Identification of 850 nm Thick 7%YO<sub>1.5</sub>–93%HfO<sub>2</sub> Films by Surface and Cross-Sectional Raman Spectroscopies

https://mdr.nims.go.jp/datasets/775db27f-cbc8-4524-92c7-b668eaabe3f7

## File

- [最初20231122_raman_HfO2.pdf](https://mdr.nims.go.jp/filesets/b88a6638-8ce9-4c3f-9a83-5aea69fe5372/download) ([Detail](https://mdr.nims.go.jp/filesets/b88a6638-8ce9-4c3f-9a83-5aea69fe5372.md))

## Id

775db27f-cbc8-4524-92c7-b668eaabe3f7

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-12-23T05:25:32.331201Z

## Updated at

2024-12-24T04:59:01.935340Z

## Published at

2024-12-24T04:59:01.993865Z

## Doi

https://doi.org/10.48505/nims.5210

## First published url

https://doi.org/10.1021/acsaelm.4c00134

## Date published

2024-04-23

## Recorded date published

2024-4-23

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: Phase Identification of 850 nm Thick 7%YO<sub>1.5</sub>–93%HfO<sub>2</sub>
    Films by Surface and Cross-Sectional Raman Spectroscopies
  title_type: original
  lang: en

## Description

- description: Phase identification of 850 nm thick 7%YO1.5–93%HfO2 films was carried
    out by analyzing both the surface and cross-sectional Raman spectra together with
    conventional X-ray diffraction (XRD). Preparation of 7%YO1.5–93%HfO2 films was
    conducted by deposition at room temperature on Pt-coated (100)Si substrates by
    pulsed laser deposition and postheat-treatment at 600–1100 °C under atmospheric
    N2 flow. The cross-sectional Raman spectra changed with the postheat-treatment
    temperature in accordance with the crystal structure determined by XRD measurements.
    Moreover, surface Raman analysis revealed that the crystalline phase transformed
    from the tetragonal phase (P42/nmc) to the orthorhombic phase (Pca21) when an
    electric field was applied. These data clearly show that Raman spectroscopy is
    a powerful tool for detecting the constituent phase with a spatial resolution
    on the order of several micrometers. In addition, a good signal-to-noise ratio
    was obtained from the cross-sectional Raman spectrum of 850 nm thick 7%YO1.5–93%HfO2
    films, indicating promise for future measurements of the strain state and phase
    distribution along the thickness direction using this good spatial resolution.
  description_type: abstract
  lang: und

## Creator

- name: Takanori Mimura
  role: author
- name: Yuma Takahashi
  role: author
- name: Takahisa Shiraishi
  role: author
- name: Masanori Kodera
  role: author
- name: Reijiro Shimura
  role: author
- name: Keisuke Ishihama
  role: author
- name: Kazuki Okamoto
  role: author
- name: Hiroki Moriwake
  role: author
- name: Ayako Taguchi
  role: author
- name: Takao Shimizu
  role: author
  orcid: https://orcid.org/0000-0001-9508-7601
  organization: National Institute for Materials Science
- name: Yasuhiro Fujii
  role: author
- name: Akitoshi Koreeda
  role: author
- name: Hiroshi Funakubo
  role: author

## Contact agent



## Publisher

organization: American Chemical Society (ACS)

## Managing organization



## Keyword

- subject: Raman spectroscopy
  schema: not_defined
- subject: field-induced phase transition
  schema: not_defined
- subject: Multiple phase
  schema: not_defined
- subject: HfO2-based ferroelectric film
  schema: not_defined

## Rights

- description: This document is the unedited Author’s version of a Submitted Work
    that was subsequently accepted for publication in ACS Applied Electronic Materials,
    copyright © 2024 American Chemical Society after peer review. To access the final
    edited and published work see https://doi.org/10.1021/acsaelm.4c00134.
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: ACS Applied Electronic Materials
  issn: '26376113'
  volume: '6'
  issue: '4'
  start_page: 2500
  end_page: 2506

## Conference



## Related item



## Funding

- identifier: JPJ011438
  funder_name: Ministry of Education, Culture, Sports, Science and Technology
- identifier: JPMXP1122683430
  funder_name: Ministry of Education, Culture, Sports, Science and Technology
- identifier: 19H00758
  funder_name: Japan Society for the Promotion of Science
- identifier: 21H01617
  funder_name: Japan Society for the Promotion of Science
- identifier: 22K18307
  funder_name: Japan Society for the Promotion of Science
- identifier: 23K13364
  funder_name: Japan Society for the Promotion of Science

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: b88a6638-8ce9-4c3f-9a83-5aea69fe5372
  filename: 最初20231122_raman_HfO2.pdf
  content_type: application/pdf
  size: 996731
  md5: c68d6783306f0dfb4b93cab83ba90921

## Thumbnail

fileset_id: b88a6638-8ce9-4c3f-9a83-5aea69fe5372
filename: 最初20231122_raman_HfO2.pdf