# Fabricating Metallic–Dielectric Zirconium Nitride Thin Films for Photoelectric Conversion

https://mdr.nims.go.jp/datasets/7658f2f9-0090-43ed-8760-6636ed8d5ee3

## File

- [ZrN_v3_clean.pdf](https://mdr.nims.go.jp/filesets/18ab4377-9713-4e59-a5b0-8e227d77dce4/download) ([Detail](https://mdr.nims.go.jp/filesets/18ab4377-9713-4e59-a5b0-8e227d77dce4.md))

## Id

7658f2f9-0090-43ed-8760-6636ed8d5ee3

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-05-02T04:21:48.640193Z

## Updated at

2026-02-17T03:31:04.768012Z

## Published at

2026-02-17T00:11:03.397078Z

## Doi

https://doi.org/10.48505/nims.5462

## First published url

https://doi.org/10.1021/acsaom.4c00453

## Date published

2025-02-28

## Recorded date published

2025-2-28

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Fabricating Metallic–Dielectric Zirconium Nitride Thin Films for Photoelectric
    Conversion
  title_type: original
  lang: en

## Description

- description: Metals and dielectrics are essential components in photoelectric conversions
    and plasmonics. In these applications, basically any materials with negative and
    positive permittivities can be used as metals and dielectrics, respectively. Although
    there are many possible combinations of metallic and dielectric materials, they
    usually consist of different elements, making it challenging to create metal-dielectric
    interfaces from materials with identical elements. In this study, metallic and
    dielectric zirconium nitrides (Zr-N) are fabricated by controlling the flow rates
    of argon and nitrogen. Characterization by X-ray photoemission spectroscopy and
    X-ray diffraction reveals that the metallic and dielectric phases are ZrN and
    Zr3N4, respectively. The photoresponse is demonstrated by constructing a metal–insulator–metal
    structure using metallic and dielectric Zr-N thin films. Fabricating plasmonic
    nanostructures in Zr-N thin films can potentially improve the photoresponse. Additionally,
    other transition metal nitrides are also candidates for realizing metallic and
    dielectric components with the same constituent elements.
  description_type: abstract
  lang: und

## Creator

- name: Satoshi Ishii
  role: author
  orcid: https://orcid.org/0000-0003-0731-8428
- name: Anjaneyulu Oruganti
  role: author
- name: Ilario Bisignano
  role: author
  orcid: https://orcid.org/0009-0004-9964-2106
- name: Hideki Abe
  role: author
  orcid: https://orcid.org/0000-0002-8392-7586

## Contact agent



## Publisher

organization: American Chemical Society (ACS)

## Managing organization



## Keyword

- subject: Zirconium Nitride
  schema: not_defined
- subject: Plasmonic ceramic
  schema: not_defined
- subject: Photocurrent
  schema: not_defined
- subject: Sputtering
  schema: not_defined

## Rights

- description: This document is the Accepted Manuscript version of a Published Work
    that appeared in final form in CS Applied Optical Materials, copyright © 2025
    American Chemical Society after peer review and technical editing by the publisher.
    To access the final edited and published work see https://doi.org/10.1021/acsaom.4c00453.
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2025-02-17
end_date: 2026-02-17

## Journal

- title: ACS Applied Optical Materials
  issn: '27719855'
  volume: '3'
  issue: '2'
  start_page: 313
  end_page: 318

## Conference



## Related item



## Funding

- identifier: 22H01917
  funder_name: Japan Society for the Promotion of Science
- identifier: JPMJFR2139
  funder_name: Fusion Oriented REsearch for disruptive Science and Technology

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## Structure for specimen



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## Process for specimen treatment



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## Fileset

- id: 18ab4377-9713-4e59-a5b0-8e227d77dce4
  filename: ZrN_v3_clean.pdf
  content_type: application/pdf
  size: 887827
  md5: 11a1423b45fa76f1bbaa2f05b23e8151

## Thumbnail

fileset_id: 18ab4377-9713-4e59-a5b0-8e227d77dce4
filename: ZrN_v3_clean.pdf