@misc{masataka2026a, title = {Analysis of In x Ga1− x N growth rate in atmospheric-pressure metal-organic vapor phase epitaxy: Insights into incorporation and desorption processes of GaN and InN for precise growth control}, author = {Masataka Imura, Takanobu Hiroto, Takaaki Mano, Yuri Itokazu, Masafumi Jo}, publisher = {AIP Publishing}, year = {2026-03-21}, keywords = {MOVPE, GaN, InN, InGaN, XRD, Superlattice} }