# High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures

https://mdr.nims.go.jp/datasets/761cdb8c-2b97-43f7-b0de-381885d67efc

## File

- [2024055940.pdf](https://mdr.nims.go.jp/filesets/948992ce-1b92-487c-9ac8-c05eed20f52b/download) ([Detail](https://mdr.nims.go.jp/filesets/948992ce-1b92-487c-9ac8-c05eed20f52b.md))

## Id

761cdb8c-2b97-43f7-b0de-381885d67efc

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2026-10-10T10:03:14.958688Z

## Updated at

2026-10-13T08:16:05.096878Z

## Published at

2026-10-13T09:28:33.150650Z

## Doi

https://doi.org/10.48505/nims.8657

## First published url



## Date published



## Recorded date published



## Resource type

conference_paper

## Manuscript type

na

## Collection



## Title

- title: High-order resonance of single-crystal diamond MEMS with high-quality factor
    at high temperatures
  title_type: original
  lang: en

## Description

- description: MEMS resonators are typically engineered to function at their first
    vibration mode, and extensive research has been dedicated to understanding and
    optimizing this fundamental mode. However, despite the demonstrated effectiveness
    of operating at high modes for achieving high sensitivity in MEMS sensing applications,
    there is currently no reported research on higher-order modes at high temperatures.
    This paper reports an investigation on the resonance properties of higher-order
    vibration modes of single crystal diamond (SCD) MEMS, specifically focusing on
    their performance at elevated temperatures up to 500°C. It is shown that the second
    mode of SCD cantilever exhibits a high-quality factor of 9,541 and high thermal
    stability of frequency less than 10 ppm/°C at 500°C.
  description_type: abstract
  lang: eng

## Creator

- name: Guo Chen
  role: author
  orcid: https://orcid.org/0009-0004-9263-5616
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Zilong Zhang
  role: author
  orcid: https://orcid.org/0000-0002-9759-9253
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Keyun Gu
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Liwen Sang
  role: author
  orcid: https://orcid.org/0000-0003-0946-1025
  organization: National Institute for Materials Science
  department: Research Center for Materials Nanoarchitectonics (MANA)/Quantum Materials
    Field/Thin Film Electronics Group
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Masaya Toda
  role: author
  organization: Graduate School of Engineering, Tohoku University
- name: Yasuo Koide
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials
- name: Zhaohui Huang
  role: author
  organization: China University of Geosciences
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group

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## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- description: "© 2024 IEEE.  Personal use of this material is permitted.  Permission
    from IEEE must be obtained for all other uses, in any current or future media,
    including reprinting/republishing this material for advertising or promotional
    purposes, creating new collective works, for resale or redistribution to servers
    or lists, or reuse of any copyrighted component of this work in other works."
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal



## Conference

name: 19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
  (IEEE-NEMS 2024)
start_date: 2024-05-02
end_date: 2024-05-05
identifier: https://www.ieee-nems2024.org/

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## Fileset

- id: 948992ce-1b92-487c-9ac8-c05eed20f52b
  filename: 2024055940.pdf
  content_type: application/pdf
  size: 1287973
  md5: d33c38f9b5529a6b71d3fac07e30c199

## Thumbnail

fileset_id: 948992ce-1b92-487c-9ac8-c05eed20f52b
filename: 2024055940.pdf