@misc{takayoshi2023a,
  title = {Anisotropic non-plasma HCl gas etching of (010) β-Ga2O3 substrate},
  author = {Takayoshi Oshima, Yuichi Oshima},
  publisher = {IOP Publishing},
  year = {2023-06-01},
  keywords = {Ga2O3, HCl gas etching}
}