Estimation of Inelastic Mean Free Paths in Au and Cu from Their Elastic Peak Intensity Ratios without IMFP Values of Reference Material in The 200 – 5000 eV Energy Range

S. Tanuma; H. Yoshikawa; N. Okamoto; K. Goto

doi:10.1384/jsa.15.195

論文 Estimation of Inelastic Mean Free Paths in Au and Cu from Their Elastic Peak Intensity Ratios without IMFP Values of Reference Material in The 200 – 5000 eV Energy Range

S. Tanuma (National Institute for Materials Science) ; H. Yoshikawa (National Institute for Materials Science) ; N. Okamoto ; K. Goto

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引用

S. Tanuma, H. Yoshikawa, N. Okamoto, K. Goto. Estimation of Inelastic Mean Free Paths in Au and Cu from Their Elastic Peak Intensity Ratios without IMFP Values of Reference Material in The 200 – 5000 eV Energy Range. Journal of Surface Analysis. 2018, (), 195-199. https://doi.org/10.1384/jsa.15.195

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(abstract)

We have determined electron inelastic mean free paths (IMFPs) and surface-electronic excitation parameters (SEPs) of Au and Cu in the 200 – 5000 eV from their elastic peak intensity ratios without reference IMFP values. This proposed method does not require the IMFP values of the reference material. The measurements of elastic peak intensities of these elements were done with noble CMA system. The elastic peak intensities were also calculated from two parameter sets (IMFPs and SEPs for both elements) with Monte Carlo method. By comparison of these two EPI ratios as changing the parameter sets, we have estimated their IMFPs and SEPs in the 200 – 5000 eV energy range. The resulting IMFPs of Au and Cu were in good agreement with optical IMFPs over 1000 eV energy range.

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