# Electron Inelastic Scattering in Surface Analysis

https://mdr.nims.go.jp/datasets/71aaf19a-1f34-4318-9cf3-3f9e9a693b25

## File

- [23 Tanuma ejSSNT Author MS.pdf](https://mdr.nims.go.jp/filesets/3424f25b-dfe4-48a2-ab47-05b92fc82344/download) ([Detail](https://mdr.nims.go.jp/filesets/3424f25b-dfe4-48a2-ab47-05b92fc82344.md))

## Id

71aaf19a-1f34-4318-9cf3-3f9e9a693b25

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-05-12T00:53:59.100031Z

## Updated at

2024-01-05T13:12:24.833185Z

## Published at

2023-05-12T04:42:16.770820Z

## Doi

https://doi.org/10.48505/nims.3961

## First published url

https://doi.org/10.1380/ejssnt.2023-038

## Date published

2023-05-10

## Recorded date published

2023

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: 表面分析における電子の非弾性散乱
  title_type: alternative
  lang: ja
- title: Electron Inelastic Scattering in Surface Analysis
  title_type: original
  lang: en

## Description

- description: This paper discusses the recent progress in electron inelastic mean
    free paths (IMFPs) calculations with the dielectric response function and optical
    energy loss function (ELF) as key parameters. For most materials, the IMFP values
    calculated using various algorithms show good agreements with each other in the
    energy region above 300 eV; however, a large difference exists in the energy region
    under 200 eV. The energy dependencies of IMFPs calculated from optical ELFs can
    be expressed using the modified Bethe equation for energy regions between 50 eV
    and 200 keV; the material dependence of IMFPs can be expressed by the TPP-2M equation.
    For IMFP calculations, the treatments and evaluations of the electron exchange
    effect, the effect of energy gap in the energy loss function, and the associated
    integral region remain important issues that will need to be addressed in the
    future.
  description_type: abstract
  lang: eng

## Creator

- name: Shigeo Tanuma
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941
  organization: 技術開発・共用部門
  department: 運営室

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## Publisher

organization: Surface Science Society Japan

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## Keyword

- subject: IMFP
  schema: not_defined
- subject: inelastic mean free path
  schema: not_defined
- subject: dielectric function model
  schema: not_defined
- subject: energy loss function
  schema: not_defined
- subject: modified Bethe equation
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc-nd/4.0/

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## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: e-Journal of Surface Science and Nanotechnology
  issn: '13480391'
  volume: '12'
  start_page: 114
  end_page: 120

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## Fileset

- id: 3424f25b-dfe4-48a2-ab47-05b92fc82344
  filename: 23 Tanuma ejSSNT Author MS.pdf
  content_type: application/pdf
  size: 1419295
  md5: df7a7c1ce5e40fb709c05c32e1f1738e

## Thumbnail

fileset_id: 3424f25b-dfe4-48a2-ab47-05b92fc82344
filename: 23 Tanuma ejSSNT Author MS.pdf