# Optical properties of single-crystal diamond MEMS: mitigating substrate interference

https://mdr.nims.go.jp/datasets/6e892f31-0fcf-495f-85a2-5dba7dcfc64c

## File

- [4.29 Characterization of diamond MEMS cantilevers mitigating substrate interference effects _Liao.docx](https://mdr.nims.go.jp/filesets/fb792a1e-0a18-4cc8-8b95-65291cca244f/download) ([Detail](https://mdr.nims.go.jp/filesets/fb792a1e-0a18-4cc8-8b95-65291cca244f.md))

## Id

6e892f31-0fcf-495f-85a2-5dba7dcfc64c

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-10-27T07:22:39.513895Z

## Updated at

2025-10-28T03:30:30.125243Z

## Published at

2025-10-28T03:16:22.190979Z

## Doi

https://doi.org/10.48505/nims.5828

## First published url

https://doi.org/10.1080/26941112.2025.2570362

## Date published

2025-12-31

## Recorded date published

2025-12-31

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: 'Optical properties of single-crystal diamond MEMS: mitigating substrate
    interference'
  title_type: original
  lang: en

## Description

- description: The precise characterization of bulk properties of thin homoepitaxial
    diamond layers with micrometer thickness is difficult due to the interference
    from the substrate. In this work, we utilized smart-cut method to fabricate single-crystal
    diamond (SCD) cantilevers or plates and transferred them to a foreign substrate
    (SiO2/Si). The mechanical resonance of the SCD cantilevers was characterized to
    confirm that the ion-implantation-induced damaged layer was nearly removed under
    the cantilever. Raman, photoluminescence (PL), and cathodoluminescence (CL) measurements
    were conducted on the transferred SCD cantilevers/plates and homoepitaxial layers
    on the substrate with and without ion implantation. As a result, it was found
    that both of the Raman spectral properties of the SCD layer on the ion-implanted
    regions and the freestanding SCD plates/cantilevers successfully avoid interference
    from the substrate. PL analysis showed no emission peaks attributable to nitrogen
    and other defects from the epilayers. Additionally, CL analysis from the freestanding
    cantilevers/plates disclosed the exciton emission at around 236 nm at room temperature.
    These results suggest the high crystal quality of the SCD cantilevers for MEMS
    applications.
  description_type: abstract
  lang: und

## Creator

- name: Keyun Gu
  role: author
  orcid: https://orcid.org/0000-0002-7505-7744
- name: Zilong Zhang
  role: author
- name: Zhaozong Zhang
  role: author
  orcid: https://orcid.org/0009-0003-8745-4469
- name: Jian Huang
  role: author
- name: Yasuo Koide
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266

## Contact agent



## Publisher

organization: Informa UK Limited

## Managing organization



## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Functional Diamond
  issn: '26941112'
  volume: '5'
  issue: '1'
  article_number: '2570362'

## Conference



## Related item



## Funding

- identifier: 24KF0085
  funder_name: JSPS KAKENHI
- identifier: 24H00287
  funder_name: JSPS KAKENHI
- identifier: 22K18957
  funder_name: JSPS KAKENHI
- identifier: JPMXP1224NM5055
  funder_name: Advanced Research Infrastructure for Materials and Nanotechnology in
    Japan (ARIM) of MEXT
- identifier: '202306890007'
  funder_name: China Scholarship Council

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



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## Fileset

- id: fb792a1e-0a18-4cc8-8b95-65291cca244f
  filename: 4.29 Characterization of diamond MEMS cantilevers mitigating substrate
    interference effects _Liao.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 15100420
  md5: d69604b272af8225d9d307a4e4138045

## Thumbnail

fileset_id: fb792a1e-0a18-4cc8-8b95-65291cca244f
filename: 4.29 Characterization of diamond MEMS cantilevers mitigating substrate interference
  effects _Liao.docx