# Achieving High Piezoelectric Performance across a Wide Composition Range in Tetragonal (Bi,Na)TiO<sub>3</sub>–BaTiO<sub>3</sub> Films for Micro-electromechanical Systems

https://mdr.nims.go.jp/datasets/6d5daa86-addf-4f13-a3a6-9021056bf5da

## File

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## Id

6d5daa86-addf-4f13-a3a6-9021056bf5da

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-12-23T05:08:31.327589Z

## Updated at

2024-12-24T04:58:44.234681Z

## Published at

2024-12-24T04:58:44.293433Z

## Doi



## First published url

https://doi.org/10.1021/acsami.3c13302

## Date published

2024-01-10

## Recorded date published

2024-1-10

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: Achieving High Piezoelectric Performance across a Wide Composition Range
    in Tetragonal (Bi,Na)TiO<sub>3</sub>–BaTiO<sub>3</sub> Films for Micro-electromechanical
    Systems
  title_type: original
  lang: en

## Description

- description: "Tetragonal (1−x)(Bi,Na)TiO3−xBaTiO3 films exhibit enhanced piezoelectric
    properties\r\ndue   to   domain   switching   over   a   wide   composition   range.
    \  These   properties   were\r\nobserved over a significantly wider composition
    range than the morphotropic phase\r\nboundary (MPB), which typically has a limited
    composition range of 1–2%. The\r\npolarization axis was found to  be   along   the
    \  in-plane   direction   for   the   tetragonal\r\ncomposition range of  x =
    0.06–1.0, attributed to the tensile thermal strain from the\r\nsubstrate during
    cooling after the film formation. A “two-step increase” in remanent\r\npolarization
    against an applied maximum electric field was observed at high field region\r\ndue
    to the domain switching, and a very high piezoelectric response (effective d33
    value,\r\ndenoted as d33,f) over 220 pm/V was achieved for a wide composition
    range of x = 0.2–\r\n0.5 with high tetragonality, exceeding previously reported
    values for bulk ceramics.\r\nMoreover, a transverse piezoelectric coefficient,
    \ e31,f, of 19 C/m2  measured using a\r\ncantilever structure, was obtained for
    a composition range of at least 10 at% (for both x\r\n= 0.2 and 0.3). This value
    is the highest reported for Pb-free piezoelectric thin films and\r\nis comparable
    to the best data for Pb-based thin films. Reversible domain switching\r\neliminates
    the need for conventional MPB compositions, allowing an improvement in\r\npiezoelectric
    properties over a wider composition range. This strategy could provide a\r\nguideline
    for the development of environmentally acceptable lead-free piezoelectric\r\nfilms
    with composition-insensitive piezoelectric performance to replace Pb-based\r\nmaterials
    with the MPB composition, such as PZT."
  description_type: abstract
  lang: und

## Creator

- name: Keisuke Ishihama
  role: author
- name: Takao Shimizu
  role: author
  orcid: https://orcid.org/0000-0001-9508-7601
  organization: National Institute for Materials Science
- name: Kazuki Okamoto
  role: author
- name: Akinori Tateyama
  role: author
- name: Wakiko Yamaoka
  role: author
- name: Risako Tsurumaru
  role: author
- name: Shintaro Yoshimura
  role: author
- name: Yusuke Sato
  role: author
- name: Hiroshi Funakubo
  role: author

## Contact agent



## Publisher

organization: American Chemical Society (ACS)

## Managing organization



## Keyword

- subject: Pb-free Piezoelectric film
  schema: not_defined
- subject: domain switching
  schema: not_defined
- subject: " out-of-morphotropic phase boundary composition"
  schema: not_defined
- subject: " tetragonal structure"
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



## Data origin



## Embargo



## Journal

- title: ACS Applied Materials &amp; Interfaces
  issn: '19448252'
  volume: '16'
  issue: '1'
  start_page: 1308
  end_page: 1316

## Conference



## Related item



## Funding

- identifier: 20H05185
  funder_name: Ministry of Education, Culture, Sports, Science and Technology
- identifier: JPMXP0112101001
  funder_name: Core Research for Evolutional Science and Technology
- identifier: 23KJ0903
  funder_name: Japan Society for the Promotion of Science
- identifier: 19K15288
  funder_name: Japan Society for the Promotion of Science

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



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## Fileset

- id: 29b3cabd-8123-483c-85e0-6dea4e9bb2e2
  filename: ishihama-et-al-2023-achieving-high-piezoelectric-performance-across-a-wide-composition-range-in-tetragonal-(bi-na)tio3
    (1).pdf
  content_type: application/pdf
  size: 2388116
  md5: 44ea40ec22fe03d1df578f115861b2df

## Thumbnail

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filename: ishihama-et-al-2023-achieving-high-piezoelectric-performance-across-a-wide-composition-range-in-tetragonal-(bi-na)tio3
  (1).pdf