# Calculations of Electron Inelastic Mean Free Paths   III. Data for 15 Inorganic compounds over the 50 - 2000 eV Range

https://mdr.nims.go.jp/datasets/6d52f38b-316c-4fc1-a749-1b1c238bb0c6

## Files

- [IMFP III Author Ms.pdf](https://mdr.nims.go.jp/filesets/63e95e15-9460-4e79-b3cc-38955d300585/download) ([Detail](https://mdr.nims.go.jp/filesets/63e95e15-9460-4e79-b3cc-38955d300585.md))

## Id

6d52f38b-316c-4fc1-a749-1b1c238bb0c6

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-08-02T05:08:07.944750Z

## Updated at

2023-08-03T02:15:31.815739Z

## Published at

2023-08-03T04:30:15.806962Z

## Doi

https://doi.org/10.48505/nims.4227

## First published url

https://doi.org/10.1002/sia.740171305

## Date published

2004-09-15

## Recorded date published

1991-12

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Calculations of Electron Inelastic Mean Free Paths   III. Data for 15 Inorganic
    compounds over the 50 - 2000 eV Range
  title_type: original
  lang: en

## Description

- description: 'We report calculations of electron inelastic mean free path (IMFPs)
    of 50-2000 eV electrons in a group of 15 inorganic compounds (Al2O3, GaAs, Gap,
    InAs, InP, InSb, KCl, LiF, NaCl, PbS, PbTe, SiC, Si3N4, SiO2, and ZnS). As was
    found in similar calculations for a group of 27 elements, there are substantial
    differences in the shapes of the IMFP versus energy curves from compound to compound
    for energies below 200 eV; these differences are associated with the different
    inelastic electron scattering characteristics of each material. Comparisons are
    made of the calculated IMFPs and the values calculated from the predictive IMFP
    formula TPP-2 developed from the IMFP calculations for the elements. Deviations
    in this comparison are found, which correlated with uncertainties of the optical
    data from which the IMFPs were calculated. The TPP-2 IMFP formula is therefore
    believed to be a more reliable means for determining IMFPs for these compounds
    than the direct calculations. '
  description_type: abstract
  lang: en

## Creator

- name: Tanuma, Shigeo
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941
  organization: 物質・材料研究機構
  department: 装置開発・共用部門
- name: Powell, C. J.
  role: author
  organization: NIST
- name: Penn, D. R.
  role: author
  organization: NIST

## Contact agent

- name: 田沼繁夫
  email: tanuma-sh@tbd.t-com.ne.jp
  orcid: https://orcid.org/0000-0003-2628-9941
  organization: 物質・材料研究機構
  department: 装置開発・共用部門
  ror: https://ror.org/

## Publisher

organization: 'Wiley '

## Managing organization



## Keyword

- subject: Inorganic compounds
  schema: not_defined
- subject: IMFP
  schema: not_defined
- subject: TPP-2
  schema: not_defined

## Rights

- description: 'This is the peer reviewed version of the following article: Calculations
    of Electron Inelastic Mean Free Paths III. Data for 15 Inorganic compounds over
    the 50 - 2000 eV Range, which has been published in final form at https://doi.org/10.1002/sia.740171305.
    This article may be used for non-commercial purposes in accordance with Wiley
    Terms and Conditions for Use of Self-Archived Versions. This article may not be
    enhanced, enriched or otherwise transformed into a derivative work, without express
    permission from Wiley or by statutory rights under applicable legislation. Copyright
    notices must not be removed, obscured or modified. The article must be linked
    to Wiley’s version of record on Wiley Online Library and any embedding, framing
    or otherwise making available the article or pages thereof by third parties from
    platforms, services and websites other than Wiley Online Library must be prohibited.'
  identifier: https://creativecommons.org/licenses/by-nc/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Surface and Interface Analysis
  issn: '10969918'
  volume: '17'
  issue: '13'
  start_page: 927
  end_page: 939

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## Fileset

- id: 63e95e15-9460-4e79-b3cc-38955d300585
  filename: IMFP III Author Ms.pdf
  content_type: application/pdf
  size: 3750104
  md5: 5e65f992bcea34227e1279f2e146b61b

## Thumbnail

fileset_id: 63e95e15-9460-4e79-b3cc-38955d300585
filename: IMFP III Author Ms.pdf