# Oxygen-termination effect on the surface energy dissipation in diamond MEMS

https://mdr.nims.go.jp/datasets/6cb33157-efeb-46ae-8df9-2b08486fdc7d

## File

- [3.17 Oxygen-terminated diamond surface desorption induces low surface energy dissipation in diamond MEMS　LiaoR1.docx](https://mdr.nims.go.jp/filesets/86e2f59d-d8ce-4562-8be9-3856d9a73057/download) ([Detail](https://mdr.nims.go.jp/filesets/86e2f59d-d8ce-4562-8be9-3856d9a73057.md))

## Id

6cb33157-efeb-46ae-8df9-2b08486fdc7d

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-05-15T12:56:04.734162Z

## Updated at

2024-07-09T03:30:27.748314Z

## Published at

2024-07-09T03:30:27.854847Z

## Doi

https://doi.org/10.48505/nims.4586

## First published url

https://doi.org/10.1016/j.carbon.2024.119159

## Date published

2024-04-18

## Recorded date published

2024-5

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: Oxygen-termination effect on the surface energy dissipation in diamond MEMS
  title_type: original
  lang: en

## Description

- description: Single-crystal diamond (SCD) microelectromechanical systems (MEMS)
    resonators with lower energy dissipation and higher quality (Q) factors have always
    been pursued for the development of high-sensitivity and high signal-to-noise
    ratio (SNR) MEMS sensors. The intrinsic loss such as the crystal quality and extrinsic
    loss of clamping loss have been examined to improve the Q factors of SCD MEMS
    resonators. Nevertheless, the surface termination induced energy dissipation has
    rarely been known due to the lack of high crystal quality diamond resonators and
    in-situ characterization. Here we examine the effect of oxygen-termination on
    the surface energy dissipation of SCD cantilevers by in-situ heating these cantilevers
    in a high vacuum chamber. After thermal treatment of the cantilevers at 933 K,
    the Q factor of the cantilever is improved from 2.8x105 to 3.3x105 (i.e. the 120
    μm-long). The resonance frequency increase confirms the desorption of surface
    adsorbates. Compared to silicon, on which a native solid-state oxide exists, the
    surface oxygen-termination induced loss in diamond MEMS is much smaller. The non-existence
    of native oxides on diamond surface is an obvious merit toward ultra-high Q factor
    MEMS resonators.
  description_type: abstract
  lang: und

## Creator

- name: Keyun Gu
  role: author
- name: Zilong Zhang
  role: author
- name: Guo Chen
  role: author
- name: Jian Huang
  role: author
- name: Yasuo Koide
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
- name: Wen Zhao
  role: author
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266

## Contact agent



## Publisher

organization: Elsevier BV

## Managing organization



## Keyword

- subject: Diamond, MEMS, sensors
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Carbon
  issn: '00086223'
  volume: '225'
  article_number: '119159'

## Conference



## Related item



## Funding

- identifier: 22K18957
  funder_name: Japan Society for the Promotion of Science
- identifier: 15H03999
  funder_name: Japan Society for the Promotion of Science
- identifier: 24H00287
  funder_name: Japan Society for the Promotion of Science
- identifier: JPMXP1223NM5297
  funder_name: Ministry of Education, Culture, Sports, Science and Technology
- funder_name: Chinese Academy of Sciences
- identifier: '202306890007'
  funder_name: China Scholarship Council

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 86e2f59d-d8ce-4562-8be9-3856d9a73057
  filename: 3.17 Oxygen-terminated diamond surface desorption induces low surface
    energy dissipation in diamond MEMS　LiaoR1.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 8881485
  md5: a5382bc6b8864ebf5b53d030104c9a25

## Thumbnail

fileset_id: 86e2f59d-d8ce-4562-8be9-3856d9a73057
filename: 3.17 Oxygen-terminated diamond surface desorption induces low surface energy
  dissipation in diamond MEMS　LiaoR1.docx