# High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures

https://mdr.nims.go.jp/datasets/6b6b9788-6f2f-4bd5-8d40-2fbccacff734

## File

- [IEEE NEMS 2024_Abstract_V4 _Chen Guo.docx](https://mdr.nims.go.jp/filesets/1c330a81-3ba9-492c-8170-f5c6a0c92975/download) ([Detail](https://mdr.nims.go.jp/filesets/1c330a81-3ba9-492c-8170-f5c6a0c92975.md))

## Id

6b6b9788-6f2f-4bd5-8d40-2fbccacff734

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-10-11T01:09:09.587047Z

## Updated at

2024-10-11T07:30:28.595009Z

## Published at

2024-10-11T07:30:28.873426Z

## Doi

https://doi.org/10.48505/nims.4839

## First published url

https://doi.org/10.1109/nems60219.2024.10639909

## Date published

2024-05-02

## Recorded date published

2024-5-2

## Resource type

conference_paper

## Manuscript type

authors_original

## Collection



## Title

- title: High-order resonance of single-crystal diamond MEMS with high-quality factor
    at high temperatures
  title_type: original
  lang: en

## Description

- description: MEMS resonators are typically engineered to function at their first
    vibration mode, and extensive research has been dedicated to understanding and
    optimizing this fundamental mode. However, despite the demonstrated effectiveness
    of operating at high modes for achieving high sensitivity in MEMS sensing applications,
    there is currently no reported research on higher-order modes at high temperatures.
    This paper reports an investigation on the resonance properties of higher-order
    vibration modes of single crystal diamond (SCD) MEMS, specifically focusing on
    their performance at elevated temperatures up to 500°C. It is shown that the second
    mode of SCD cantilever exhibits a high-quality factor of 9,541 and high thermal
    stability of frequency less than 10 ppm/°C at 500°C.
  description_type: abstract
  lang: und

## Creator

- name: Guo Chen
  role: author
- name: Zilong Zhang
  role: author
- name: Keyun Gu
  role: author
- name: Liwen Sang
  role: author
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
- name: Masaya Toda
  role: author
- name: Yasuo Koide
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
- name: Zhaohui Huang
  role: author
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266

## Contact agent



## Publisher

organization: IEEE

## Managing organization



## Keyword

- subject: Diamond, MEMS
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular
    Systems (NEMS)
  issn: '24743755'
  start_page: 1
  end_page: 4

## Conference



## Related item



## Funding

- funder_name: China Scholarship Council

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 1c330a81-3ba9-492c-8170-f5c6a0c92975
  filename: IEEE NEMS 2024_Abstract_V4 _Chen Guo.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 5041603
  md5: ad9d6d6bcdfff708c14e9af149f8ed4c

## Thumbnail

fileset_id: 1c330a81-3ba9-492c-8170-f5c6a0c92975
filename: IEEE NEMS 2024_Abstract_V4 _Chen Guo.docx