# InP/GaInAsP多層膜におけるAES深さ分解能の温度依存性

https://mdr.nims.go.jp/datasets/6a8fa441-ce7d-4137-a512-98eb0b62761f

## File

- [JSA_Vol.1_No.2_227-233.pdf](https://mdr.nims.go.jp/filesets/f3bcdc60-35e1-4e89-96d0-125a027f1b03/download) ([Detail](https://mdr.nims.go.jp/filesets/f3bcdc60-35e1-4e89-96d0-125a027f1b03.md))

## Id

6a8fa441-ce7d-4137-a512-98eb0b62761f

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2021-08-05T16:24:14.450508Z

## Updated at

2022-10-02T16:44:22.738560Z

## Published at

2021-08-12T16:20:01.064404Z

## Doi

https://doi.org/10.48505/nims.3041

## First published url

http://www.sasj.jp/JSA/CONTENTS/vol.1_2/Vol.1%20No.2/Vol.1%20No.2%20227-233.pdf

## Date published

1995-05-17

## Recorded date published

17/05/1995

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: InP/GaInAsP多層膜におけるAES深さ分解能の温度依存性
  title_type: original
  lang: en

## Description

- description: InP/GaInAsP多層膜を用いて，AES深さ方向分析における深さ分解能の試料温度依存性について検討を行なった．試料温度は，０〜５０℃（１０℃間隔）およびー１２０，−２０℃の８条件としてデプスプロファイルを取得した．スパッタリング条件は，イオン種：Ar，イオン加速電圧：1kV，測定したAugerピークはP
    LVV，In MNNである．その結果，深さ分解能は明確に試料の温度に依存し，温度が低くなるほど著しく向上することがわかった．また，深さ分解能と表面あれには相関関係がみられた．そして，深さ分解能を低下させる主要因は表面あれであると考えられる．
  description_type: abstract
  lang: en

## Creator

- name: Ogiwara, Toshiya
  role: author
  orcid: https://orcid.org/0000-0002-7376-6571
- name: Tanuma, Shigeo
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941

## Contact agent



## Publisher

organization: Surface Analysis Society of Japan

## Managing organization



## Keyword

- subject: Auger Depth Profiling Analysis
  schema: not_defined
- subject: Depth Resolution
  schema: not_defined
- subject: Sample Temperature
  schema: not_defined
- subject: InP/GaInAsP多層膜
  schema: not_defined

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## Instrument



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## Measurement method



## Specimen



## Chemical composition



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## Fileset

- id: f3bcdc60-35e1-4e89-96d0-125a027f1b03
  filename: JSA_Vol.1_No.2_227-233.pdf
  content_type: application/pdf
  size: 494428
  md5: 9ac103d155a528decf9b927f442e9019

## Thumbnail

fileset_id: f3bcdc60-35e1-4e89-96d0-125a027f1b03
filename: JSA_Vol.1_No.2_227-233.pdf