@misc{ogiwara1995a,
  title = {InP/GaInAsP多層膜におけるAES深さ分解能の温度依存性},
  author = {Ogiwara, Toshiya, Tanuma, Shigeo},
  publisher = {Surface Analysis Society of Japan},
  year = {1995-05-17},
  keywords = {Auger Depth Profiling Analysis, Depth Resolution, Sample Temperature, InP/GaInAsP多層膜}
}