# Uncertainty evaluation of Monte Carlo simulated line scan profiles of a critical dimension scanning electron microscope (CD-SEM)

https://mdr.nims.go.jp/datasets/66579765-b398-4ec2-a617-ecaa7ce271b1

## File

- [shrine20241107-1698-49oa22.pdf](https://mdr.nims.go.jp/filesets/77eb529c-fbb3-40da-8b48-a23177d570ab/download) ([Detail](https://mdr.nims.go.jp/filesets/77eb529c-fbb3-40da-8b48-a23177d570ab.md))

## Id

66579765-b398-4ec2-a617-ecaa7ce271b1

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-11-07T02:32:43.641377Z

## Updated at

2024-11-07T07:30:44.488323Z

## Published at

2024-11-07T07:30:44.556206Z

## Doi



## First published url

https://doi.org/10.1063/5.0153379

## Date published

2023-06-28

## Recorded date published

2023-6-28

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: Uncertainty evaluation of Monte Carlo simulated line scan profiles of a critical
    dimension scanning electron microscope (CD-SEM)
  title_type: original
  lang: en

## Description

- description: In recent years, precision and accuracy for a more precise critical
    dimension (CD) control have been required in CD measurement technology. CD distortion
    between the measurement by a critical dimension scanning electron microscope (CD-SEM)
    and a reference tool is the most important factor for a more accurate CD measurement.
    CD bias varies by a CD-SEM and a pattern condition. Therefore, it is urgently
    needed to identify, characterize, and quantify those parameters that may or may
    not affect the CD measurement by a CD-SEM. The sensitivity of the Monte Carlo
    simulated CD-SEM images with multiple physical modeling components has been studied
    previously. In this study, we demonstrate that the work function and elastic scattering
    potential models have a significant impact on secondary electron emission intensity,
    but their influence on the shape of the linescan profile is small, and other factors
    like the optical energy loss function and dielectric function models have even
    smaller effects.
  description_type: abstract
  lang: und

## Creator

- name: M. S. S. Khan
  role: author
- name: S. F. Mao
  role: author
- name: Y. B. Zou
  role: author
- name: Y. G. Li
  role: author
- name: B. Da
  role: author
  orcid: https://orcid.org/0000-0002-0785-8662
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Z. J. Ding
  role: author

## Contact agent



## Publisher

organization: AIP Publishing

## Managing organization



## Keyword

- subject: Monte Carlo
  schema: not_defined

## Rights

- description: Published under an exclusive license by AIP Publishing
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Journal of Applied Physics
  issn: '00218979'
  volume: '133'
  issue: '24'
  article_number: '245303'

## Conference



## Related item



## Funding

- identifier: 2019YFE03080500
  funder_name: National MCF Energy R&D Program of China
- identifier: 2022HSC-CIP010
  funder_name: Collaborative Innovation Program of Hefei Science Centre, CAS
- identifier: 2022D01A223
  funder_name: Natural Science Foundation of Xinjinag Uygur Autonomous Region
- identifier: '11975018'
  funder_name: National Natural Science Foundation of China
- identifier: 2018YFE0308100
  funder_name: National Magnetic Confinement Fusion Energy Research Project
- identifier: Y202087
  funder_name: Youth Innovation Promotion Association of CAS
- identifier: JP21K14656
  funder_name: National Institiute for Materials Science under the Support system
    for curiosity-driven research, JSPS KAKENHI
- identifier: BP0719016
  funder_name: Chinese Education Ministry Through "111 Project 2.0"
- identifier: N/A
  funder_name: Kurata Grants from The Hitachi Global Foundation and by the Iketani
    Science & Technology Foundation
- identifier: N/A
  funder_name: Iketani Science & Technology Foundation

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



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## Custom property



## Fileset

- id: 77eb529c-fbb3-40da-8b48-a23177d570ab
  filename: shrine20241107-1698-49oa22.pdf
  content_type: application/pdf
  size: 4226106
  md5: 4a6d6bb771be1333959733ca14061420

## Thumbnail

fileset_id: 77eb529c-fbb3-40da-8b48-a23177d570ab
filename: shrine20241107-1698-49oa22.pdf