# 逆向型ラジカル源を用いた薄膜化技術に関する研究(平成3〜6年度 無機材質特別研究 1995 科学技術庁 無機材質研究所研究報告書第85号

https://mdr.nims.go.jp/datasets/64f755b0-948c-4516-acfa-2ba479c22126

## File

- [NIRIM0085.pdf](https://mdr.nims.go.jp/filesets/daa6b348-0494-4b39-82f0-564141083cac/download) ([Detail](https://mdr.nims.go.jp/filesets/daa6b348-0494-4b39-82f0-564141083cac.md))

## Id

64f755b0-948c-4516-acfa-2ba479c22126

## Local identifier

identifier: hdl:someHandle/test/escidoc:577340

## Visibility

open_to_public

## State

published

## Created at

2021-08-05T16:20:57.844297Z

## Updated at

2024-02-07T06:32:27.808136Z

## Published at

2021-08-12T16:20:00.861354Z

## Doi

https://doi.org/10.11503/NIRIM0085

## First published url

https://doi.org/10.11503/nirim0085

## Date published



## Recorded date published



## Resource type

report

## Manuscript type

vor

## Collection

- id: fc8d5b40-fb9f-4fcb-ad89-24cb5a7f5424
  identifier: https://mdr.nims.go.jp/pid/fc8d5b40-fb9f-4fcb-ad89-24cb5a7f5424
  title: 無機材質研究所研究報告書

## Title

- title: 逆向型ラジカル源を用いた薄膜化技術に関する研究(平成3〜6年度 無機材質特別研究 1995 科学技術庁 無機材質研究所研究報告書第85号
  title_type: original
  lang: ja

## Description

- description_type: abstract
  lang: en

## Creator

- name: 無機材質研究所
  role: editor

## Contact agent



## Publisher

organization: 無機材質研究所

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## Keyword



## Rights

- description: In Copyright
  identifier: http://rightsstatements.org/vocab/InC/1.0/

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## Journal

- title: 無機材質研究所研究報告書
  issn: '13425129'
  start_page: 1

## Conference



## Related item



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## Instrument



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## Specimen



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## Fileset

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  filename: NIRIM0085.pdf
  content_type: application/pdf
  size: 4152945
  md5: e190cc44cfc3a2ba6906b6354684c5b0

## Thumbnail

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filename: NIRIM0085.pdf