# Ultrathin Diamond NEMS Cantilevers with Enhanced Frequency Stability for High-Sensitivity Mass Sensing

https://mdr.nims.go.jp/datasets/639751c9-c89d-4787-a50c-c9e6ee3de76a

## File

- [NDNC2026_abstract.pdf](https://mdr.nims.go.jp/filesets/688bf7d8-27a6-4520-b976-2992b593b2e7/download) ([Detail](https://mdr.nims.go.jp/filesets/688bf7d8-27a6-4520-b976-2992b593b2e7.md))

## Id

639751c9-c89d-4787-a50c-c9e6ee3de76a

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2026-10-10T09:33:06.888363Z

## Updated at

2026-10-13T01:07:38.592898Z

## Published at

2026-10-13T03:33:52.307627Z

## Doi

https://doi.org/10.48505/nims.8651

## First published url



## Date published



## Recorded date published



## Resource type

conference_poster

## Manuscript type

na

## Collection



## Title

- title: Ultrathin Diamond NEMS Cantilevers with Enhanced Frequency Stability for
    High-Sensitivity Mass Sensing
  title_type: original
  lang: en

## Description

- description: "Ultrathin single-crystal diamond (SCD) nanoelectromechanical systems
    (NEMS) are highly attractive for precision sensing because they combine nanoscale
    dimensions with exceptional mechanical robustness, low dissipation, and high thermal
    stability. Here, we investigate the frequency stability and detectable mass limit
    of a 50-nm-thick, 60-µm-long SCD cantilever fabricated by a smart-cut-assisted
    thinning strategy, with emphasis on the benefits of the second mode resonance
    operation.\r\n\r\nThe ultrathin diamond cantilever maintains high crystalline
    quality and exhibits resonance behavior consistent with the Euler–Bernoulli beam
    model, confirming excellent structural integrity at extreme thickness scaling.
    Frequency fluctuations were measured in a closed-loop tracking configuration with
    a bandwidth of 1 Hz, and the stability was quantified using Allan deviation. The
    sampling rate was fixed at 500 Sa/s. Time-domain measurements over 60 s show stable
    resonance responses for both the fundamental and second mode. As shown in Figure
    1, the Allan deviation demonstrates a clear improvement in frequency stability
    in the second mode, with the minimum value decreases from 4.89 × 10-6 for the
    fundamental mode to 1.45 × 10-6. \r\n\r\nThis improved frequency stability directly
    enhances the detectable mass limit. Based on the mass-sensing relation, the minimum
    detectable mass improves from 6.16 × 10-19 kg in the fundamental mode to 1.83
    × 10-19 kg in the second mode, showing more than a threefold enhancement. The
    improved frequency stability of the second mode arises from its higher resonance
    frequency, which reduces the relative impact of thermally induced frequency fluctuations.
    These results demonstrate that second-order mode operation is an effective route
    toward unreliable and ultrasensitive diamond NEMS for next-generation nanomechanical
    sensing."
  description_type: abstract
  lang: eng

## Creator

- name: Guo Chen
  role: author
  orcid: https://orcid.org/0009-0004-9263-5616
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Wen Zhao
  role: author
  orcid: https://orcid.org/0000-0001-8159-8195
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Zhaozong Zhang
  role: author
  orcid: https://orcid.org/0009-0003-8745-4469
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group

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## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

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## Data origin

- data_origin_type: other

## Embargo



## Journal



## Conference

name: 19th International Conference on New Diamond and Nano Carbons (NDNC 2026)
start_date: 2026-06-07
end_date: 2026-06-11
identifier: https://ndnc2026.jlu.edu.cn/

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## Fileset

- id: 688bf7d8-27a6-4520-b976-2992b593b2e7
  filename: NDNC2026_abstract.pdf
  content_type: application/pdf
  size: 273936
  md5: 3654aa5921e646ced58737b6084048cf

## Thumbnail

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filename: NDNC2026_abstract.pdf