# Effect of accelerating voltages on indexing of SEM-EBSD via pattern matching

https://mdr.nims.go.jp/datasets/5fb62089-0426-42fa-9238-ac8a6e891c26

## File

- [1-s2.0-S0304399126000793-main.pdf](https://mdr.nims.go.jp/filesets/1d70503a-1d05-478d-999b-fe9c3311080c/download) ([Detail](https://mdr.nims.go.jp/filesets/1d70503a-1d05-478d-999b-fe9c3311080c.md))

## Id

5fb62089-0426-42fa-9238-ac8a6e891c26

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2026-05-25T02:12:43.027761Z

## Updated at

2026-05-25T02:28:35.668446Z

## Published at

2026-05-25T03:30:05.835167Z

## Doi



## First published url

https://doi.org/10.1016/j.ultramic.2026.114387

## Date published

2026-05-16

## Recorded date published

2026-7

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: Effect of accelerating voltages on indexing of SEM-EBSD via pattern matching
  title_type: original
  lang: en

## Description

- description: The influence of the accelerating voltage on the spatial resolution
    and phase indexing accuracy of electron backscattered diffraction (SEM-EBSD) was
    systematically investigated using austenitic heat-resistant steel. Both traditional
    Hough transformation and novel Spherical Indexing methods were employed to analyze
    the kernel average misorientation (KAM) and indexing of fine M23C6 precipitates.
    It was confirmed that lower accelerating voltages reduce the interaction volume,
    thereby improving the spatial resolution. Spherical Indexing provided enhanced
    accuracy in detecting local misorientations, especially in the creep-ruptured
    material. While the effect of the accelerating voltage on KAM was minimal, it
    became significant when indexing fine precipitates. At 10 kV, precipitates as
    small as 50 nm on the Σ3 boundaries could be indexed, whereas precipitates of
    200 nm at 15 kV and 300 nm at 25 kV were required for reliable identification.
    These results demonstrate the critical role of measurement conditions in advanced
    EBSD microstructural characterization and suggest the effectiveness of Spherical
    Indexing for high-resolution evaluation of creep damage and phase separation of
    nanoscale features.
  description_type: abstract
  lang: und

## Creator

- name: Tomotaka Hatakeyama
  role: author
  orcid: https://orcid.org/0000-0002-2904-8177
- name: Kota Sawada
  role: author
  orcid: https://orcid.org/0000-0001-7780-1648

## Contact agent



## Publisher

organization: Elsevier BV

## Managing organization



## Keyword

- subject: EBSD
  schema: not_defined
- subject: Pattern matching
  schema: not_defined
- subject: Spherical indexing
  schema: not_defined
- subject: Accelerating voltage
  schema: not_defined
- subject: Spatial resolution
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Ultramicroscopy
  issn: '03043991'
  volume: '284'
  article_number: '114387'

## Conference



## Related item



## Funding

- funder_name: Japan Society for the Promotion of Science

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 1d70503a-1d05-478d-999b-fe9c3311080c
  filename: 1-s2.0-S0304399126000793-main.pdf
  content_type: application/pdf
  size: 17494900
  md5: df474fa63b179f7398504d76566c7a50

## Thumbnail

fileset_id: 1d70503a-1d05-478d-999b-fe9c3311080c
filename: 1-s2.0-S0304399126000793-main.pdf