@misc{hitesh2025a, title = {In situ engineering hexagonal boron nitride in van der Waals heterostructures with selective SF6 etching}, author = {Hitesh Agarwal, Antoine Reserbat-Plantey, David Barcons Ruiz, Karuppasamy Pandian Soundarapandian, Geng Li, Vahagn Mkhitaryan, Johann Osmond, Helena Lozano, Kenji Watanabe, Takashi Taniguchi, Petr Stepanov, Frank H L Koppens, Roshan Krishna Kumar}, publisher = {IOP Publishing}, year = {2025-10-01}, keywords = {hexagonal boron nitride (hBN)
, selective etching, van der Waals heterostructures
} }