# Pulsed laser deposition of ZnO/MgxZn1-xO superlattices for quantum cascade laser applications

https://mdr.nims.go.jp/datasets/5df8907f-4c88-48d3-808e-738975ed0e4c

## File

- [Pulsed laser deposition of ZnO MgxZn1-xO superlattices for quantum cascade laser applications.pdf](https://mdr.nims.go.jp/filesets/11244d9d-d47d-42d1-b6ee-38baa8af4c10/download) ([Detail](https://mdr.nims.go.jp/filesets/11244d9d-d47d-42d1-b6ee-38baa8af4c10.md))
- [STAM-2026-0038_data.zip](https://mdr.nims.go.jp/filesets/d2e2371c-fed6-4c72-9651-fb40cd29f2c5/download) ([Detail](https://mdr.nims.go.jp/filesets/d2e2371c-fed6-4c72-9651-fb40cd29f2c5.md))
- [Supplementary Information.pdf](https://mdr.nims.go.jp/filesets/e9f5c01b-fab3-4728-8215-021c8a69b132/download) ([Detail](https://mdr.nims.go.jp/filesets/e9f5c01b-fab3-4728-8215-021c8a69b132.md))

## Id

5df8907f-4c88-48d3-808e-738975ed0e4c

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2026-07-17T04:27:29.457254Z

## Updated at

2026-07-17T05:49:14.343142Z

## Published at

2026-07-17T07:35:08.084686Z

## Doi

https://doi.org/10.48505/nims.6414

## First published url

https://doi.org/10.1080/14686996.2026.2701639

## Date published

2026-07-16

## Recorded date published



## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Pulsed laser deposition of ZnO/MgxZn1-xO superlattices for quantum cascade
    laser applications
  title_type: original
  lang: en

## Description

- description: We developed a precise molecular layer deposition technique using pulsed
    laser deposition (PLD) to realize a quantum cascade laser (QCL) structure using
    wide-bandgap semiconductors ZnO and MgxZn1-xO. Compared to GaAs and InP, ZnO has
    a larger optical bandgap (3.3 eV) and higher longitudinal optical phonon energy
    (72 meV). This combination suppresses leakage current and promotes fast nonradiative
    relaxation, making ZnO a promising material for high-temperature QCL devices operating
    near room temperature. Nanometer-order thickness control is essential for realizing
    a QCL device structure. However, PLD techniques suffer from fluctuations in the
    deposition rate caused by viewport contamination. In this study, a quartz crystal
    microbalance is used to continuously measure the deposition mass during the PLD
    process. The combination of a cooling and shielding design with an infrared heating
    system is used to suppress the thermal drift and plasma damage. Consequently,
    precise molecular layer control is achieved in the periodic structure of the ZnO/MgxZn1-xO
    superlattice. The prepared ZnO QCL structure is characterized by scanning transmission
    electron microscopy and X-ray diffraction, which confirms that the designed superstructure
    is reproduced with high precision. This study establishes a PLD process to realize
    ZnO-based QCL and paves the way for developing new QCL platforms using wide-bandgap
    materials.
  description_type: abstract
  lang: en

## Creator

- name: Tatsuya Masuda
  role: author
  organization: a Smart Combinatorial Technology
- name: Toshihiro Sato
  role: author
- name: Norihiko Sekine
  role: author
- name: Iwao Hosako
  role: author
- name: Gen-Ichi Hatakoshi
  role: author
- name: Hideomi Koinuma
  role: author
- name: Ryota Takahashi
  role: author

## Contact agent



## Publisher

organization: Taylor & Francis

## Managing organization



## Keyword

- subject: Pulsed laser deposition
  schema: not_defined
- subject: quantum cascade laser
  schema: not_defined
- subject: ZnO/MgxZn1-xO superlattices
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Science and Technology of Advanced Materials
  issn: '14686996'
  volume: '27'
  article_number: " 2701639"

## Conference



## Related item



## Funding



## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 11244d9d-d47d-42d1-b6ee-38baa8af4c10
  filename: Pulsed laser deposition of ZnO MgxZn1-xO superlattices for quantum cascade
    laser applications.pdf
  content_type: application/pdf
  size: 5407087
  md5: 6f8ee1fcb90e0898c417dbdc0f2efe42
- id: d2e2371c-fed6-4c72-9651-fb40cd29f2c5
  filename: STAM-2026-0038_data.zip
  content_type: application/zip
  size: 342846
  md5: 1ef28d307df959fc2d0055a17faf42a3
- id: e9f5c01b-fab3-4728-8215-021c8a69b132
  filename: Supplementary Information.pdf
  content_type: application/pdf
  size: 7602667
  md5: bf375889bd2bb84f2f7545ff40757233

## Thumbnail

fileset_id: e9f5c01b-fab3-4728-8215-021c8a69b132
filename: Supplementary Information.pdf