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説明:

Proliferation of van der Waals (vdW) heterostructures formed by stacking lay- ered materials can accelerate scientific and technological advances in nano- electronics. Here, we report a scalable strategy for building high-quality vdW heterostructures. Our method relies on efficient interface engineering of the exfoliation substrate using a sub-5 nm poly(vinyl alcohol) coating. Our method has three main features that distinguish it from existing techniques. First is the remarkable consistency of its exfoliation process in increasing the yield (20 times) and in producing ultra-large (>10,000 μm2) monolayer graphene flakes. Second is the applicability of its layer transfer process to a variety of layered materials without the use of a specialized stamp—a feature useful for generalizing the assembly process of layered materials. Third is its ability for successful layer transfer of flakes even after long-term storage of the exfolia- tion substrate. We illustrate the capability of our technique by demonstrating vdW graphene devices with peak carrier mobility of 200,000 and 800,000 cm2V−1s−1 at room temperature and 9 K, respectively. The simplicity and versatility of our strategy may open doors for the automated fabrication of vdW heterostructures.

権利情報:

• Creative Commons BY Attribution 4.0 International
  

キーワード: Van der Waals heterostructures, graphene devices, carrier mobility

刊行年月日: 2020-06-15

出版者: Springer Science and Business Media LLC

掲載誌:

• Nature Communications (ISSN: 20411723) vol. 11 issue. 1 3029

研究助成金:

• Gordon and Betty Moore Foundation GBMF 4838
• National Science Foundation EECS-1638598
• National Science Foundation DMR-1420073
• National Science Foundation MRI-1531664

原稿種別: 出版者版 (Version of record)

MDR DOI:

公開URL: https://doi.org/10.1038/s41467-020-16817-1

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更新時刻: 2025-02-27 08:30:14 +0900

MDRでの公開時刻: 2025-02-27 08:30:14 +0900