@misc{yusuke2026a, title = {Reference-Free Quantitative Mass Spectrometry Enables Sequencing of Resist Copolymers and Reveals Sequence-Dependent Deprotection Sensitivity}, author = {Yusuke Hibi, Yasuyuki Nakamura, Shiho Uesaka, Masanobu Naito}, publisher = {American Chemical Society (ACS)}, year = {2026-02-10}, keywords = {polymer sequencing, monomer sequence analysis, pyrolysis mass spectrometry, photoresist, non-negative matrix factorization, reference-free quantitative mass spectrometry} }