@misc{ryo2024a,
  title = {Predicting the surface roughness of an electrodeposited copper film using a machine learning technique},
  author = {Ryo Tamura, Ryuichi Inaba, Mami Watanabe, Yutaro Mori, Makoto Urushihara, Kenji Yamaguchi, Shoichi Matsuda},
  publisher = {Taylor & Francis},
  year = {2024-12-31},
  keywords = {electrodeposited copper film, surface roughness, machine learning}
}