# α-Al2O3/Ga2O3 superlattices coherently grown on r-plane sapphire

https://mdr.nims.go.jp/datasets/5bb6b051-3b38-4e3a-a9c3-870aa0e354dd

## File

- [alpha_SL.docx](https://mdr.nims.go.jp/filesets/c7cd6d04-1971-426f-8399-7e4479aff5ed/download) ([Detail](https://mdr.nims.go.jp/filesets/c7cd6d04-1971-426f-8399-7e4479aff5ed.md))

## Id

5bb6b051-3b38-4e3a-a9c3-870aa0e354dd

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-11-24T05:02:34.467090Z

## Updated at

2024-01-05T13:12:13.312313Z

## Published at

2023-11-28T04:30:38.861485Z

## Doi

https://doi.org/10.48505/nims.4268

## First published url

https://doi.org/10.7567/APEX.11.065501

## Date published

2018-06-01

## Recorded date published

2018-6-1

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: α-Al2O3/Ga2O3 superlattices coherently grown on r-plane sapphire
  title_type: alternative
  lang: ja
- title: α-Al2O3/Ga2O3 superlattices coherently grown on r-plane sapphire
  title_type: original
  lang: en

## Description

- description: Ten-period binary α-Al2O3/Ga2O3 superlattices were fabricated on r-plane
    sapphire substrates by molecular beam epitaxy. By systematic variation of α-Ga2O3
    thickness and evaluation through X-ray reflectivity and diffraction measurements
    and scanning transmission electron microscopy, we verified that the superlattice
    with α-Ga2O3 thickness up to >1nm had coherent interfaces without misfit dislocation
    in spite of the large lattice mismatches. This successful fabrication of coherent
    α-Al2O3/Ga2O3 superlattices will encourage further development of α-(AlxGa1%x)2O3-based
    heterostructures including superlattices.
  description_type: abstract
  lang: eng

## Creator

- name: Takayoshi Oshima
  role: author
  orcid: https://orcid.org/0000-0001-8550-9735
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Yuji Kato
  role: author
- name: Masataka Imura
  role: author
  orcid: https://orcid.org/0000-0002-4236-9549
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Yoshiko Nakayama
  role: author
  orcid: https://orcid.org/0000-0002-7607-6779
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Masaki Takeguchi
  role: author
  orcid: https://orcid.org/0000-0002-0282-6020
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26

## Contact agent



## Publisher

organization: IOP Publishing

## Managing organization



## Keyword

- subject: Ga2O3
  schema: not_defined
- subject: Superlattice
  schema: not_defined

## Rights

- description: "© 2018 The Japan Society of Applied Physics\r\n<br>\r\n This is an
    author-created, un-copyedited version of an article accepted for publication in
    Applied Physics Express, Volume 11, Number 6. IOP Publishing Ltd is not responsible
    for any errors or omissions in this version of the manuscript or any version derived
    from it. The Version of Record is available online at https://doi.org/10.7567/APEX.11.065501."
  identifier: https://creativecommons.org/licenses/by-nc-nd/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2018-04-27
end_date: 2019-04-27

## Journal

- title: APPLIED PHYSICS EXPRESS
  issn: '18820778'
  volume: '11'
  issue: '6'
  start_page: 65501
  end_page: 65501

## Conference



## Related item



## Funding

- identifier: 16K13673
  funder_name: 科研費

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: c7cd6d04-1971-426f-8399-7e4479aff5ed
  filename: alpha_SL.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 5889036
  md5: 9574c6187c0a46dd191f16d79e5bac92

## Thumbnail

fileset_id: c7cd6d04-1971-426f-8399-7e4479aff5ed
filename: alpha_SL.docx