@misc{international2021a,
  title = {[Research Highlights Vol.68] New GaN MEMS Resonator Is Temperature-Stable up to 600 K},
  author = {International Center for Materials Nanoarchitectonics (WPI-MANA)},
  publisher = {National Institute for Materials Science},
  year = {2021-07-13},
  keywords = {GaN, MEMS, NEMS, energy storage, temperature coefficient of frequency, AlN, Si, Strain}
}