# Electrical and UV-sensing performance of N-doped-Ba(Ti,Zr,Mo,Hf,Ta)O3-dielectric and ZnSnO-channel-based flexible thin-film transistors

https://mdr.nims.go.jp/datasets/5afe3c63-012f-49d9-bf3f-6c17b3f56352

## File

- [ApplSurFScieNCKU_MDR.pdf](https://mdr.nims.go.jp/filesets/cfdf77db-3e51-4c23-a6f3-4d4584427a3b/download) ([Detail](https://mdr.nims.go.jp/filesets/cfdf77db-3e51-4c23-a6f3-4d4584427a3b.md))
- [ApplSurFScieNCKU_SI.pdf](https://mdr.nims.go.jp/filesets/a4eacd24-7e3f-4c91-844d-95e69a83ed07/download) ([Detail](https://mdr.nims.go.jp/filesets/a4eacd24-7e3f-4c91-844d-95e69a83ed07.md))

## Id

5afe3c63-012f-49d9-bf3f-6c17b3f56352

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-11-25T23:14:16.283387Z

## Updated at

2024-11-26T00:23:59.556851Z

## Published at

2026-10-18T23:30:57.856731Z

## Doi

https://doi.org/10.48505/nims.5031

## First published url

https://doi.org/10.1016/j.apsusc.2024.161568

## Date published

2024-10-19

## Recorded date published

2025-2

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Electrical and UV-sensing performance of N-doped-Ba(Ti,Zr,Mo,Hf,Ta)O3-dielectric
    and ZnSnO-channel-based flexible thin-film transistors
  title_type: original
  lang: en

## Description

- description: 'Flexible thin-film transistors (TFTs) based on N-doped Ba(Ti,Zr,Mo,Hf,Ta)O3
    dielectric and ZnSnO channel show high electrical and UV-sensing performance.
    The optimal N-doped Ba(Ti,Zr,Mo,Hf,Ta)O3 compositions with low equivalent oxide
    thicknesses and high-entropy are efficiently determined from a wide composition
    space. The film library is patterned to 450 metal–insulator-metal stacks, revealing
    dielectric constants ≈ 262–322 and loss (tan δ)  ≈ 0.01–0.30 for the N-doped Ba(Ti,Zr,Mo,Hf,Ta)O3
    at 1 kHz. The library is further integrated to 63 TFTs, and the promising ones
    exhibit the remarkable parameters: current on/off ratio of 108, threshold voltage
    (VT) of 0.02 V, saturation field-effect mobility of ≈76 cm2⋅V−1⋅s−1, and subthreshold
    swing of 0.062 V dec−1. Furthermore, the TFT-based ultraviolet (253 nm) detector
    demonstrates impressive sensitivity (≈ 2 × 106) and responsibility (≈ 1171.9 A
    W−1). There is no substantial degradation in electrical or sensing characteristics
    under various levels of deformation. Charge transport in constructed energy band
    diagrams is used to elucidate the observed remarkable performance.'
  description_type: abstract
  lang: und

## Creator

- name: Van Dung Nguyen
  role: author
- name: Takahiro Nagata
  role: author
  orcid: https://orcid.org/0000-0002-8591-2943
- name: Huu Duc Luong
  role: author
- name: K.-S. Chang
  role: author
  orcid: https://orcid.org/0000-0002-2876-9255

## Contact agent



## Publisher

organization: Elsevier BV

## Managing organization



## Keyword

- subject: thin-film transistors
  schema: not_defined
- subject: N-doped-Ba(Ti,Zr,Mo,Hf,Ta)O3 dielectric
  schema: not_defined
- subject: ZnSnO channel
  schema: not_defined
- subject: flexibility
  schema: not_defined
- subject: UV detector
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc-nd/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2024-10-19
end_date: 2026-10-19

## Journal

- title: Applied Surface Science
  issn: '01694332'
  volume: '681'
  article_number: '161568'

## Conference



## Related item



## Funding

- identifier: MOST 112-2224-E-006-003
  funder_name: National Science and Technology Council
- identifier: MOST 111-2224-E-006-005
  funder_name: National Science and Technology Council

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: cfdf77db-3e51-4c23-a6f3-4d4584427a3b
  filename: ApplSurFScieNCKU_MDR.pdf
  content_type: application/pdf
  size: 3250307
  md5: a0053adf8da51bf850a6b9969f458b85
- id: a4eacd24-7e3f-4c91-844d-95e69a83ed07
  filename: ApplSurFScieNCKU_SI.pdf
  content_type: application/pdf
  size: 1968448
  md5: 0eec7ea27531cd5bb997689fdde3a6cf

## Thumbnail

fileset_id: a4eacd24-7e3f-4c91-844d-95e69a83ed07
filename: ApplSurFScieNCKU_SI.pdf