@misc{ogiwara1996a,
  title = {試料冷却法を併用したAES深さ方向分析によるSiO2/Si熱酸化膜の分析},
  author = {Ogiwara, Toshiya, Tanuma, Shigeo},
  publisher = {Surface Analysis Society of Japan},
  year = {1996-02-08},
  keywords = {Auger Depth Profiling Analysis, SiO2/Si, Sample Cooling Method}
}