@misc{rintaro2025a,
  title = {Estimation of valence state and growth rate using principal component analysis of plasma emission in reactive sputtering deposition},
  author = {Rintaro Minami, Eiji Kita, Chiharu Mitsumata, Hideto Yanagihara},
  publisher = {Taylor & Francis},
  year = {2025-12-31},
  keywords = {Machine learning, principal component analysis (PCA), reactive magnetron sputtering, plasma emission spectrum, Mössbauer spectroscopy}
}