# Electrical Readout of Single-Crystal Diamond MEMS Resonators for Infrared Sensing

https://mdr.nims.go.jp/datasets/57725793-c171-4b26-a707-24c12c5319d9

## File

- [JSAP 2026 Abstract.doc](https://mdr.nims.go.jp/filesets/836c0d94-e87c-44d3-b3ac-548b595b4bd9/download) ([Detail](https://mdr.nims.go.jp/filesets/836c0d94-e87c-44d3-b3ac-548b595b4bd9.md))

## Id

57725793-c171-4b26-a707-24c12c5319d9

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## Visibility

open_to_public

## State

published

## Created at

2026-10-13T05:17:00.025390Z

## Updated at

2026-10-14T02:38:06.076702Z

## Published at

2026-10-14T05:31:07.160245Z

## Doi

https://doi.org/10.48505/nims.8658

## First published url



## Date published



## Recorded date published



## Resource type

conference_paper

## Manuscript type

na

## Collection



## Title

- title: Electrical Readout of Single-Crystal Diamond MEMS Resonators for Infrared
    Sensing
  title_type: original
  lang: en

## Description

- description: "In this work, we demonstrate the electrical readout of SCD cantilever
    resonators for IR sensing. Metal electrodes were deposited on the surface of the
    diamond cantilevers, consisting of Ti/Au layers with thicknesses of 50 nm and
    10 nm, respectively. The electrical readout is based on the piezoresistive effect
    of the metal electrodes. When the cantilever resonator vibrates at resonance,
    bending-induced strain changes the resistance of the metal electrode, enabling
    electrical detection of the mechanical resonance.\r\nFig. 1(a) shows an optical
    image of our SCD-based transducer array, which comprises four cantilever-type
    sensors with a cantilever length of 140 μm. The source, drain, and gate electrodes
    are denoted as S, D, and Gate, respectively. The resonators were actuated by an
    RF-driven piezoceramic element, and their resonance responses were electrically
    detected through the metal electrodes. Fig. 1(b) shows the resonance spectra of
    the transducer array measured without and with IR irradiation at Vsd = 3 V and
    Vp = 2 V.  Resonance peaks corresponding to Sensors 1-4 are clearly observed,
    confirming successful electrical readout of the SCD resonator array. Upon IR irradiation,
    the resonance response changes, demonstrating the feasibility of the electrically
    read out SCD resonators for IR sensing.\r\nThis approach provides a simple and
    effective route toward circuit-compatible diamond MEMS sensors. The electrical
    readout scheme based on metal piezoresistance is attractive for integrating SCD
    resonators with on-chip or external electronic circuits and may be extended to
    other resonant sensing applications, such as magnetic, thermal, and force sensing.\r\n"
  description_type: abstract
  lang: eng

## Creator

- name: Guo Chen
  role: author
  orcid: https://orcid.org/0009-0004-9263-5616
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Zhaozong Zhang
  role: author
  orcid: https://orcid.org/0009-0003-8745-4469
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group

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## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

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## Data origin

- data_origin_type: other

## Embargo



## Journal



## Conference

name: 2026年 第87回応用物理学会秋季学術講演会
start_date: 2026-09-08
end_date: 2026-09-11
identifier: https://meeting.jsap.or.jp/

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## Fileset

- id: 836c0d94-e87c-44d3-b3ac-548b595b4bd9
  filename: JSAP 2026 Abstract.doc
  content_type: application/msword
  size: 529408
  md5: 307efa9038d1ca5b7623abcb2e4686ba

## Thumbnail

fileset_id: 836c0d94-e87c-44d3-b3ac-548b595b4bd9
filename: JSAP 2026 Abstract.doc