@misc{takayoshi2024a,
  title = {Using selective-area growth and selective-area etching on (−102) β-Ga2O3 substrates to fabricate plasma-damage-free vertical fins and trenches},
  author = {Takayoshi Oshima, Yuichi Oshima},
  publisher = {Applied Phyiscs Letters},
  year = {2024-01-22},
  keywords = {Ga2O3, (-102), selective area growth, selective area etching}
}