# Strain Control of (001)-Polar-Axis-Oriented Epitaxial Y-Doped HfO<sub>2</sub> Thin Films

https://mdr.nims.go.jp/datasets/562ae5fe-8ca2-4f53-b647-93ae06bfff18

## File

- [maekawa-et-al-2024-strain-control-of-(001)-polar-axis-oriented-epitaxial-y-doped-hfo2-thin-films (1).pdf](https://mdr.nims.go.jp/filesets/727d0fd0-a1c9-4654-835c-9e9c14ecf271/download) ([Detail](https://mdr.nims.go.jp/filesets/727d0fd0-a1c9-4654-835c-9e9c14ecf271.md))

## Id

562ae5fe-8ca2-4f53-b647-93ae06bfff18

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-12-23T05:00:12.027306Z

## Updated at

2024-12-24T04:58:35.586660Z

## Published at

2024-12-24T04:58:35.659045Z

## Doi



## First published url

https://doi.org/10.1021/acsaelm.4c00368

## Date published

2024-07-25

## Recorded date published



## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: Strain Control of (001)-Polar-Axis-Oriented Epitaxial Y-Doped HfO<sub>2</sub>
    Thin Films
  title_type: original
  lang: en

## Description

- description: "{100}-Oriented epitaxial orthorhombic (Hf0.93Y0.07)O2 (7YHO) films
    were grown at 700 °C on various substrates, with and without (Ce0.35Zr0.65)O2
    (CZO) buffer layers, by using pulsed laser deposition. The crystal phase and orientation
    were determined by X-ray diffraction. The long axis [100] or short axis [010]/[001]
    orientations were controlled by lattice matching. Nearly relaxed epitaxial orthorhombic
    (100) 7YHO films on LaAlO3 and SrRuO3/SrTiO3 substrates were obtained, and their
    unclamped lattice constants were experimentally observed. The in-plane lattice
    parameter of the (010)/(001)-oriented 7YHO films obtained by using the CZO buffer
    layers was within the range of 0.518–0.523 nm. This study demonstrates selective
    growth and lattice strain control with respect to the in-plane lattice spacing
    of the underlying layers. These findings provide further possibilities for understanding
    the fundamental ferroelectric properties of HfO2-based materials."
  description_type: abstract
  lang: und

## Creator

- name: Yoshiki Maekawa
  role: author
- name: Koji Hirai
  role: author
- name: Kazuki Okamoto
  role: author
- name: Takao Shimizu
  role: author
  orcid: https://orcid.org/0000-0001-9508-7601
  organization: National Institute for Materials Science
- name: Hiroshi Funakubo
  role: author

## Contact agent



## Publisher

organization: American Chemical Society (ACS)

## Managing organization



## Keyword

- subject: Ferroelectric HfO2-based film
  schema: not_defined
- subject: Epitaxial film
  schema: not_defined
- subject: " {100} Orientation control"
  schema: not_defined
- subject: " Polar axis orientation"
  schema: not_defined
- subject: " Pulse laser deposition"
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: ACS Applied Electronic Materials
  issn: '26376113'
  volume: '6'
  issue: '8'
  start_page: 5525
  end_page: 5535

## Conference



## Related item



## Funding

- identifier: JPJ011438
  funder_name: Ministry of Education, Culture, Sports, Science and Technology
- identifier: JPMXP1122683430
  funder_name: Ministry of Education, Culture, Sports, Science and Technology
- identifier: 21H01617
  funder_name: Japan Society for the Promotion of Science
- identifier: 22K18307
  funder_name: Japan Society for the Promotion of Science
- identifier: 23K13364
  funder_name: Japan Society for the Promotion of Science

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 727d0fd0-a1c9-4654-835c-9e9c14ecf271
  filename: maekawa-et-al-2024-strain-control-of-(001)-polar-axis-oriented-epitaxial-y-doped-hfo2-thin-films
    (1).pdf
  content_type: application/pdf
  size: 4383855
  md5: 7d4c052bd4eed2c0167f120f9ae51426

## Thumbnail

fileset_id: 727d0fd0-a1c9-4654-835c-9e9c14ecf271
filename: maekawa-et-al-2024-strain-control-of-(001)-polar-axis-oriented-epitaxial-y-doped-hfo2-thin-films
  (1).pdf