@misc{yoshiki2024a, title = {Strain Control of (001)-Polar-Axis-Oriented Epitaxial Y-Doped HfO2 Thin Films}, author = {Yoshiki Maekawa, Koji Hirai, Kazuki Okamoto, Takao Shimizu, Hiroshi Funakubo}, publisher = {American Chemical Society (ACS)}, year = {2024-07-25}, keywords = {Ferroelectric HfO2-based film, Epitaxial film, {100} Orientation control, Polar axis orientation, Pulse laser deposition} }